Ion incident angle dependence of material properties of a ZrN film on silicon prepared by the ion assisted deposition method

Susumu Horita; Hiroshi Akahori; Mituru Kobayashi

doi:10.1116/1.579920

Ion incident angle dependence of material properties of a ZrN film on silicon prepared by the ion assisted deposition method

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.579920 ◽

1996 ◽

Vol 14 (1) ◽

pp. 203-209 ◽

Cited By ~ 4

Author(s):

Susumu Horita ◽

Hiroshi Akahori ◽

Mituru Kobayashi

Keyword(s):

Material Properties ◽

Incident Angle ◽

Deposition Method ◽

Angle Dependence

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Aerosol Incident Angle Dependence of Optical and Magnetic Properties of Bi:YIG Films Deposited with Aerosol Deposition Method

Journal of the Korean Magnetics Society ◽

10.4283/jkms.2008.18.1.009 ◽

2008 ◽

Vol 18 (1) ◽

pp. 9-13

Keyword(s):

Magnetic Properties ◽

Incident Angle ◽

Aerosol Deposition ◽

Deposition Method ◽

Angle Dependence ◽

Aerosol Deposition Method ◽

Optical And Magnetic Properties

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Measurement of the Incident Angle Dependence of muon flux and Calculation Using Simulation

New Physics Sae Mulli ◽

10.3938/npsm.71.255 ◽

2021 ◽

Vol 71 (3) ◽

pp. 255-262

Author(s):

Hyeongjoon LEE ◽

Hanul YOUN ◽

Jinjoo SEO* ◽

MinJung KWEON ◽

Jin-Hee YOON

Keyword(s):

Incident Angle ◽

Muon Flux ◽

Angle Dependence

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Incident-angle dependence of ion-induced electron emission from Al & Co films using swift heavy ion

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/j.nimb.2007.12.108 ◽

2008 ◽

Vol 266 (8) ◽

pp. 1780-1782 ◽

Cited By ~ 1

Author(s):

R.S. Chauhan ◽

Sarvesh Kumar ◽

R.P. Singh ◽

A. Mandal

Keyword(s):

Electron Emission ◽

Incident Angle ◽

Heavy Ion ◽

Angle Dependence ◽

Swift Heavy Ion

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Incident-angle dependence of secondary electron emission from hydrogen-implanted carbon surfaces

Journal of Nuclear Materials ◽

10.1016/s0022-3115(06)80126-1 ◽

1992 ◽

Vol 196-198 ◽

pp. 699-702 ◽

Cited By ~ 4

Author(s):

K. Ohya ◽

K. Nishimura ◽

J. Kawata ◽

I. Mori

Keyword(s):

Electron Emission ◽

Secondary Electron ◽

Incident Angle ◽

Secondary Electron Emission ◽

Angle Dependence ◽

Carbon Surfaces

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Effect of temperature on the incident angle-dependence of the sensitivity for surface plasmon resonance spectroscopy

Thin Solid Films ◽

10.1016/s0040-6090(02)01297-x ◽

2003 ◽

Vol 425 (1-2) ◽

pp. 135-138 ◽

Cited By ~ 16

Author(s):

H.-P. Chiang ◽

Y.-C. Wang ◽

P.T. Leung

Keyword(s):

Surface Plasmon Resonance ◽

Surface Plasmon ◽

Plasmon Resonance ◽

Incident Angle ◽

Effect Of Temperature ◽

Resonance Spectroscopy ◽

Surface Plasmon Resonance Spectroscopy ◽

Angle Dependence

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Deviation from the Inverse Cosine Law upon Incident Angle Dependence of Secondary Electron Emission from Solids under Electron and Proton Bombardments

Journal of the Physical Society of Japan ◽

10.1143/jpsj.61.3013 ◽

1992 ◽

Vol 61 (8) ◽

pp. 3013-3014

Author(s):

Kaoru Ohya

Keyword(s):

Electron Emission ◽

Secondary Electron ◽

Incident Angle ◽

Secondary Electron Emission ◽

Angle Dependence ◽

Cosine Law

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Ion Incident Angle Dependence of Ridge Shapes Formed on [111] Oriented Gd3Ga5O12by Ion Beam Etching

Japanese Journal of Applied Physics ◽

10.1143/jjap.31.l591 ◽

1992 ◽

Vol 31 (Part 2, No. 5A) ◽

pp. L591-L593 ◽

Cited By ~ 1

Author(s):

Yujiro Katoh ◽

Naoto Sugimoto ◽

Akiyuki Tate ◽

Atsushi Shibukawa

Keyword(s):

Incident Angle ◽

Ion Beam ◽

Ion Beam Etching ◽

Angle Dependence

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Incident Angle Dependence of Secondary Electron Emission from Copper with Multiple Elastic Scattering of Primary Electron in the Muffin-Tin Potential

Japanese Journal of Applied Physics ◽

10.1143/jjap.29.1316 ◽

1990 ◽

Vol 29 (Part 1, No. 7) ◽

pp. 1316-1321 ◽

Cited By ~ 3

Author(s):

Kaoru Ohya ◽

Jun Kawata ◽

Ichiro Mori

Keyword(s):

Elastic Scattering ◽

Electron Emission ◽

Secondary Electron ◽

Incident Angle ◽

Secondary Electron Emission ◽

Primary Electron ◽

Angle Dependence

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Incident angle dependence of sputtering yields for hydrogen bombardment of light elements

Journal of Nuclear Materials ◽

10.1016/0022-3115(87)90003-1 ◽

1987 ◽

Vol 150 (3) ◽

pp. 266-271 ◽

Cited By ~ 33

Author(s):

W. Eckstein ◽

A. Sagara ◽

K. Kamada

Keyword(s):

Incident Angle ◽

Light Elements ◽

Angle Dependence ◽

Sputtering Yields

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Incident angle dependence of photographic darkness on X-ray films exposed in emulsion chambers

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/0168-583x(93)96009-2 ◽

1993 ◽

Vol 82 (4) ◽

pp. 549-556 ◽

Cited By ~ 1

Author(s):

M. Luksys ◽

A. Ohsawa ◽

E.H. Shibuya

Keyword(s):

Incident Angle ◽

X Ray ◽

Angle Dependence

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