Reactive ion etching‐induced damage in GaAs/AlGaAs quantum well structures and recovery by rapid thermal annealing and hydrogen passivation

1995 ◽  
Vol 13 (3) ◽  
pp. 931-934 ◽  
Author(s):  
Byueng‐Su Yoo ◽  
Seong‐Ju Park ◽  
Kyung‐Ho Park
Keyword(s):  
Quantum Well ◽  
Thermal Annealing ◽  
Rapid Thermal Annealing ◽  
Reactive Ion Etching ◽  
Hydrogen Passivation ◽  
Ion Etching ◽  
Quantum Well Structures

Photoluminescence of quantum well structures fabricated by reactive ion etching

1996 ◽  
Vol 159 (1-4) ◽  
pp. 451-454 ◽  
Author(s):  
H. Straub ◽  
G. Brunthaler ◽  
W. Faschinger ◽  
G. Bauer ◽  
C. Vieu
Keyword(s):  
Quantum Well ◽  
Reactive Ion Etching ◽  
Ion Etching ◽  
Quantum Well Structures

Effects of rapid thermal annealing on strain-compensated GaInNAs/GaAsP quantum well structures and lasers

2001 ◽  
Vol 78 (1) ◽  
pp. 91-92 ◽  
Author(s):  
Wei Li ◽  
Jani Turpeinen ◽  
Petri Melanen ◽  
Pekka Savolainen ◽  
Petteri Uusimaa ◽  
...  
Keyword(s):  
Quantum Well ◽  
Thermal Annealing ◽  
Rapid Thermal Annealing ◽  
Quantum Well Structures

Recovery of Si Surfaces Subjected to Reactive Ion Etching Using Rapid Thermal Annealing

1988 ◽  
Vol 135 (4) ◽  
pp. 1037-1038 ◽  
Author(s):  
S. J. Fonash ◽  
X. C. Mu ◽  
S. Chakravarti ◽  
L. C. Rathbun
Keyword(s):  
Thermal Annealing ◽  
Rapid Thermal Annealing ◽  
Reactive Ion Etching ◽  
Ion Etching

Improvement of GaAs/AlGaAs quantum well laser diodes by rapid thermal annealing

1994 ◽  
Vol 23 (1) ◽  
pp. 1-6 ◽  
Author(s):  
K. Xie ◽  
C. R. Wie ◽  
J. A. Varriano ◽  
G. W. Wicks
Keyword(s):  
Quantum Well ◽  
Thermal Annealing ◽  
Rapid Thermal Annealing ◽  
Laser Diodes ◽  
Quantum Well Laser
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