Quantitative determination of titanium nitride films by high energy resolution Auger electron spectroscopy

Qing Yu Zhang

doi:10.1116/1.579478

Quantitative determination of titanium nitride films by high energy resolution Auger electron spectroscopy

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.579478 ◽

1995 ◽

Vol 13 (5) ◽

pp. 2384-2389 ◽

Cited By ~ 5

Author(s):

Qing Yu Zhang

Keyword(s):

Quantitative Determination ◽

Titanium Nitride ◽

Auger Electron Spectroscopy ◽

Energy Resolution ◽

Electron Spectroscopy ◽

Auger Electron ◽

High Energy ◽

High Energy Resolution

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Microspot elementary and chemical analyses using combined high energy resolution Auger electron spectroscopy and x‐ray photoelectron spectroscopy

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.572952 ◽

1985 ◽

Vol 3 (5) ◽

pp. 1965-1968 ◽

Cited By ~ 5

Author(s):

P. Staib ◽

J. P. Contour ◽

J. Massies

Keyword(s):

Auger Electron Spectroscopy ◽

Energy Resolution ◽

Photoelectron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

High Energy ◽

High Energy Resolution ◽

Chemical Analyses ◽

X Ray

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A method for rapid collection of high‐energy‐resolution Auger electron spectroscopy data: The digital‐derivative‐generation technique

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.575024 ◽

1988 ◽

Vol 6 (4) ◽

pp. 2280-2286 ◽

Cited By ~ 2

Author(s):

Richard E. Gilbert ◽

Gar B. Hoflund ◽

Douglas A. Asbury ◽

Mark R. Davidson

Keyword(s):

Auger Electron Spectroscopy ◽

Energy Resolution ◽

Electron Spectroscopy ◽

Auger Electron ◽

High Energy ◽

High Energy Resolution ◽

Spectroscopy Data ◽

Generation Technique ◽

Auger Electron Spectroscopy Data

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Summary Abstract: High energy resolution Auger electron spectroscopy of Ti and TiN

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.574772 ◽

1987 ◽

Vol 5 (4) ◽

pp. 1371-1372 ◽

Cited By ~ 16

Author(s):

F. Pellerin ◽

C. Bodin ◽

T. Pech

Keyword(s):

Auger Electron Spectroscopy ◽

Energy Resolution ◽

Electron Spectroscopy ◽

Auger Electron ◽

High Energy ◽

High Energy Resolution

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Quantitative determination of atomic concentrations by Auger electron spectroscopy

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.575487 ◽

1988 ◽

Vol 6 (6) ◽

pp. 3130-3133 ◽

Cited By ~ 6

Author(s):

Y. Goldstein ◽

A. Many ◽

O. Millo ◽

S. Z. Weisz ◽

O. Resto

Keyword(s):

Quantitative Determination ◽

Auger Electron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron

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Effective attenuation lengths for quantitative determination of surface composition by Auger-electron spectroscopy and X-ray photoelectron spectroscopy

Journal of Electron Spectroscopy and Related Phenomena ◽

10.1016/j.elspec.2017.04.008 ◽

2017 ◽

Vol 218 ◽

pp. 1-12 ◽

Cited By ~ 10

Author(s):

A. Jablonski ◽

C.J. Powell

Keyword(s):

Quantitative Determination ◽

Auger Electron Spectroscopy ◽

Photoelectron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Surface Composition ◽

X Ray

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Summary Abstract: Quantitative determination of the surface composition of sulfur‐bearing anion mixtures by Auger electron spectroscopy

Journal of Vacuum Science and Technology ◽

10.1116/1.570437 ◽

1980 ◽

Vol 17 (1) ◽

pp. 214-215 ◽

Cited By ~ 5

Author(s):

N. H. Turner ◽

J. S. Murday ◽

D. E. Ramaker

Keyword(s):

Quantitative Determination ◽

Auger Electron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Surface Composition

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Quantitative determination of surface composition of sulfur bearing anion mixtures by Auger electron spectroscopy

Analytical Chemistry ◽

10.1021/ac50051a021 ◽

1980 ◽

Vol 52 (1) ◽

pp. 84-92 ◽

Cited By ~ 49

Author(s):

N. H. Turner ◽

J. S. Murday ◽

D. E. Ramaker

Keyword(s):

Quantitative Determination ◽

Auger Electron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Surface Composition

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Surface chemical analysis. Auger electron spectroscopy and X-ray photoelectron spectroscopy. Determination of lateral resolution, analysis area, and sample area viewed by the analyser

10.3403/30124424 ◽

2005 ◽

Keyword(s):

Chemical Analysis ◽

Auger Electron Spectroscopy ◽

Photoelectron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Surface Chemical ◽

X Ray ◽

Resolution Analysis ◽

Surface Chemical Analysis

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A correlation of Auger electron spectroscopy, x‐ray photoelectron spectroscopy, and Rutherford backscattering spectrometry measurements on sputter‐deposited titanium nitride thin films

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.574092 ◽

1986 ◽

Vol 4 (6) ◽

pp. 2463-2469 ◽

Cited By ~ 104

Author(s):

Brad J. Burrow ◽

Alan E. Morgan ◽

Russell C. Ellwanger

Keyword(s):

Thin Films ◽

Titanium Nitride ◽

Auger Electron Spectroscopy ◽

Photoelectron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Rutherford Backscattering Spectrometry ◽

Rutherford Backscattering ◽

X Ray ◽

Sputter Deposited

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Determination of the depth resolution of Auger electron spectroscopy depth profiles of anodic barrier oxide films on differently pretreated aluminium substrates

Surface and Interface Analysis ◽

10.1002/sia.740220139 ◽

1994 ◽

Vol 22 (1-12) ◽

pp. 175-180 ◽

Cited By ~ 8

Author(s):

J. De Laet ◽

K. De Boeck ◽

H. Terryn ◽

J. Vereecken

Keyword(s):

Auger Electron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Oxide Films ◽

Depth Resolution ◽

Depth Profiles ◽

Auger Electron Spectroscopy Depth

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