Kinetic and mechanistic study of the chemical vapor deposition of titanium dioxide thin films using tetrakis‐(isopropoxo)‐titanium(IV)

Carl. P. Fictorie; John F. Evans; Wayne L. Gladfelter

doi:10.1116/1.579173

Kinetic and mechanistic study of the chemical vapor deposition of titanium dioxide thin films using tetrakis‐(isopropoxo)‐titanium(IV)

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.579173 ◽

1994 ◽

Vol 12 (4) ◽

pp. 1108-1113 ◽

Cited By ~ 57

Author(s):

Carl. P. Fictorie ◽

John F. Evans ◽

Wayne L. Gladfelter

Keyword(s):

Thin Films ◽

Titanium Dioxide ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Mechanistic Study ◽

Titanium Dioxide Thin Films

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Kinetic and mechanistic study on the chemical vapor deposition of titanium dioxide thin films by in situ FT-IR using TTIP

Surface and Coatings Technology ◽

10.1016/s0257-8972(03)00271-8 ◽

2003 ◽

Vol 171 (1-3) ◽

pp. 198-204 ◽

Cited By ~ 59

Author(s):

Kyoung-Ho Ahn ◽

Young-Bae Park ◽

Dong-Wha Park

Keyword(s):

Thin Films ◽

Titanium Dioxide ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Mechanistic Study ◽

Ft Ir ◽

Titanium Dioxide Thin Films

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On the Influence of DC Electric Fields on the Aerosol Assisted Chemical Vapor Deposition Growth of Photoactive Titanium Dioxide Thin Films

Langmuir ◽

10.1021/la403070b ◽

2013 ◽

Vol 29 (44) ◽

pp. 13542-13550 ◽

Cited By ~ 10

Author(s):

Luz Romero ◽

Russell Binions

Keyword(s):

Thin Films ◽

Titanium Dioxide ◽

Chemical Vapor Deposition ◽

Electric Fields ◽

Vapor Deposition ◽

Chemical Vapor ◽

Chemical Vapor Deposition Growth ◽

Titanium Dioxide Thin Films ◽

Dc Electric Fields

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(Invited) Pure Anatase Phase Titanium Dioxide Thin Films Prepared by Mist Chemical Vapor Deposition Applying for Photocatalysis

ECS Meeting Abstracts ◽

10.1149/ma2021-0233977mtgabs ◽

2021 ◽

Vol MA2021-02 (33) ◽

pp. 977-977

Author(s):

Chaoyang Li ◽

K. Takeda ◽

H.S. Wai

Keyword(s):

Thin Films ◽

Titanium Dioxide ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Anatase Phase ◽

Chemical Vapor ◽

Titanium Dioxide Thin Films

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Enhanced Photocatalytic Properties of Titanium Dioxide Thin Films Produced from the AC Electric Field Assisted Chemical Vapor Deposition of Titanium (IV) Chloride in Toluene

ECS Journal of Solid State Science and Technology ◽

10.1149/2.0161407jss ◽

2014 ◽

Vol 3 (7) ◽

pp. N107-N113 ◽

Cited By ~ 5

Author(s):

L. Romero ◽

A. Belen Jorge ◽

P. F. McMillan ◽

R. Binions

Keyword(s):

Thin Films ◽

Titanium Dioxide ◽

Chemical Vapor Deposition ◽

Electric Field ◽

Vapor Deposition ◽

Chemical Vapor ◽

Photocatalytic Properties ◽

Ac Electric Field ◽

Titanium Dioxide Thin Films

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Effect of Substrates on Structural Properties of Pure Anatase Phase Titanium Dioxide Thin Films Prepared By Mist Chemical Vapor Deposition

ECS Meeting Abstracts ◽

10.1149/ma2018-01/23/1452 ◽

2018 ◽

Keyword(s):

Thin Films ◽

Titanium Dioxide ◽

Chemical Vapor Deposition ◽

Structural Properties ◽

Vapor Deposition ◽

Anatase Phase ◽

Chemical Vapor ◽

Titanium Dioxide Thin Films

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Titanium dioxide thin films prepared by chemical vapor deposition

Solar Energy Materials and Solar Cells ◽

10.1016/0927-0248(92)90051-p ◽

1992 ◽

Vol 26 (4) ◽

pp. 323-329 ◽

Cited By ~ 15

Author(s):

Toshiro Maruyama ◽

Susumu Arai

Keyword(s):

Thin Films ◽

Titanium Dioxide ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Titanium Dioxide Thin Films

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Chemical vapor deposition of titanium dioxide thin films on quartz silicon and porous ceramic (silica/alumina) substrates

Journal of Aerosol Science ◽

10.1016/s0021-8502(98)90290-7 ◽

1998 ◽

Vol 29 (1-2) ◽

pp. 242

Author(s):

Shu-Chuan Huang ◽

Ton-Fong Lin ◽

Shih-Yuan Lu ◽

Kan-Sen Chou

Keyword(s):

Thin Films ◽

Titanium Dioxide ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Porous Ceramic ◽

Chemical Vapor ◽

Silica Alumina ◽

Titanium Dioxide Thin Films

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Effect of Substrates on Structural Properties of Pure Anatase Phase Titanium Dioxide Thin Films Prepared by Mist Chemical Vapor Deposition

ECS Transactions ◽

10.1149/08507.0113ecst ◽

2018 ◽

Vol 85 (7) ◽

pp. 113-118

Author(s):

Qiang Zhang ◽

Chaoyang Li

Keyword(s):

Thin Films ◽

Titanium Dioxide ◽

Chemical Vapor Deposition ◽

Structural Properties ◽

Vapor Deposition ◽

Anatase Phase ◽

Chemical Vapor ◽

Titanium Dioxide Thin Films

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Effects of water-to-methanol ratio on the structural, optical and photocatalytic properties of titanium dioxide thin films prepared by mist chemical vapor deposition

Catalysis Today ◽

10.1016/j.cattod.2019.11.019 ◽

2020 ◽

Vol 358 ◽

pp. 172-176 ◽

Cited By ~ 1

Author(s):

Qiang Zhang ◽

Chaoyang Li

Keyword(s):

Thin Films ◽

Titanium Dioxide ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Photocatalytic Properties ◽

Titanium Dioxide Thin Films

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Insights into the Role of Plasma in Atmospheric Pressure Chemical Vapor Deposition of Titanium Dioxide Thin Films

Scientific Reports ◽

10.1038/s41598-018-35154-4 ◽

2018 ◽

Vol 8 (1) ◽

Cited By ~ 6

Author(s):

Seongchan Kang ◽

Rodolphe Mauchauffé ◽

Yong Sung You ◽

Se Youn Moon

Keyword(s):

Thin Films ◽

Titanium Dioxide ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Atmospheric Pressure ◽

Chemical Vapor ◽

Pressure Chemical ◽

Titanium Dioxide Thin Films

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