Improved epitaxial layer design for real‐time monitoring of dry etching in III–V compound heterostructures with depth accuracy of ±8 nm

1994 ◽  
Vol 12 (4) ◽  
pp. 1973-1977 ◽  
Author(s):  
G. Allen Vawter ◽  
John F. Klem ◽  
Ron E. Leibenguth
Keyword(s):  
Real Time ◽  
Epitaxial Layer ◽  
Dry Etching ◽  
Real Time Monitoring

Real-Time Monitoring Of GaAs(100) Etching By Surface Photoabsorption

1995 ◽  
Vol 406 ◽  
Author(s):  
Joseph Eng ◽  
Hongbin Fang ◽  
Chaochin Su ◽  
Sujata Vemuri ◽  
Irving P. Herman ◽  
...  
Keyword(s):  
Real Time ◽  
Constant Temperature ◽  
Molecular Beam ◽  
Atomic Layer ◽  
Dry Etching ◽  
Brewster Angle ◽  
Real Time Monitoring ◽  
Fractional Change

AbstractSurface photoabsorption (SPA) has been applied to monitor, in real time, the surface of GaAs(100) during chemical dry etching by a molecular beam of HCl. Changes in the HCl flux to the surface at a constant temperature (840 K) have been used to induce changes in the Ga:As ratio on the surface. These changes in surface stoichiometry have been detected in situ via SPA measurements of the transient fractional change in the reflectance of p-polarized, 488 nm light that is incident onto the surface near the pseudo-Brewster angle. On the basis of results from prior applications of SPA to the study the atomic layer deposition of GaAs, the changes in the SPA signal as a function of the etching parameters can be correlated with changes in the relative surface densities of Ga and As. The findings are confirmed by independent determinations of the changes in surface stoichiometry made by measuring the time-integrated difference in the fluxes of Ga- and As-containing etching products evolved from the surface as a function of the HC1 flux.

1618: Real-Time Monitoring of Nitric Oxide and Blood Flow During Ischemia-Reperfusion in the Rat Testis

2006 ◽  
Vol 175 (4S) ◽  
pp. 521-521
Author(s):  
Motoaki Saito ◽  
Tomoharu Kono ◽  
Yukako Kinoshita ◽  
Itaru Satoh ◽  
Keisuke Satoh
Keyword(s):  
Nitric Oxide ◽  
Blood Flow ◽  
Real Time ◽  
Ischemia Reperfusion ◽  
Real Time Monitoring ◽  
Rat Testis

GaN heteroepitaxy by remote plasma MOCVD : Real time monitoring by laser reflectance interferometry

2001 ◽  
Vol 11 (PR3) ◽  
pp. Pr3-1175-Pr3-1182 ◽  
Author(s):  
M. Losurdo ◽  
A. Grimaldi ◽  
M. Giangregorio ◽  
P. Capezzuto ◽  
G. Bruno
Keyword(s):  
Real Time ◽  
Real Time Monitoring ◽  
Remote Plasma ◽  
Laser Reflectance

INVESTIGATION OF HAND KINEMATICS TOWARDS FRONT CRAWL SWIMMING USING NON-INVASIVE REAL-TIME MONITORING SYSTEM

2014 ◽  
Author(s):  
Rozaimi Ghazali ◽  
◽  
Asiah Mohd Pilus ◽  
Wan Mohd Bukhari Wan Daud ◽  
Mohd Juzaila Abd Latif ◽  
...  
Keyword(s):  
Real Time ◽  
Monitoring System ◽  
Real Time Monitoring ◽  
Front Crawl ◽  
Non Invasive ◽  
Hand Kinematics

101-LB: Real-Time Monitoring of Cholesterol Levels Using a Microfluidic Device

Diabetes ◽  
2019 ◽  
Vol 68 (Supplement 1) ◽  
pp. 101-LB
Author(s):  
ABHINAV BHUSHAN ◽  
SONALI J. KARNIK
Keyword(s):  
Real Time ◽  
Microfluidic Device ◽  
Real Time Monitoring ◽  
Cholesterol Levels

REALIZING IoT BASED REAL TIME MONITORING AND CONTROLLING SYSTEM

2017 ◽  
Vol 4 (4) ◽  
pp. 20
Author(s):  
KAVITHA T. ◽  
PREETHI D. LAVANYA ◽  
SARANYA S. ◽  
ANCY EVERT P.M. JONAH ◽  
◽  
...  
Keyword(s):  
Real Time ◽  
Real Time Monitoring ◽  
Controlling System

A NEW REAL-TIME MONITORING TECHNIQUE OF THE BIOCHEMICAL CONSTITUENTS OF THE ENVIRONMENT

2010 ◽  
Vol 9 (1) ◽  
pp. 133-140
Author(s):  
Petrisor Zamora Iordache ◽  
Nicoleta Petrea ◽  
Vasile Somoghi ◽  
Mihaela Muresan ◽  
Gabriel Epure ◽  
...  
Keyword(s):  
Real Time ◽  
Real Time Monitoring ◽  
Biochemical Constituents ◽  
Monitoring Technique
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