End‐point detection by sputtered neutral mass spectrometry in ion milling of prepatterned semiconductor and high‐Tc superconductor films

1994 ◽  
Vol 12 (5) ◽  
pp. 2830-2833 ◽  
Author(s):  
Christian Jaekel ◽  
Roland Barth ◽  
Hartmut G. Roskos ◽  
Heinrich Kurz
Keyword(s):  
Mass Spectrometry ◽  
Ion Milling ◽  
High Tc ◽  
High Tc Superconductor ◽  
End Point ◽  
End Point Detection ◽  
Point Detection ◽  
Superconductor Films

Focused Ion Beam Sims for Micromachining Applications

1987 ◽  
Vol 101 ◽  
Author(s):  
L. R. Harriott ◽  
M. J. Vasile
Keyword(s):  
Focused Ion Beam ◽  
Secondary Ion Mass Spectrometry ◽  
Ion Beam ◽  
High Yield ◽  
Ion Milling ◽  
End Point ◽  
Glass Interface ◽  
End Point Detection ◽  
Point Detection ◽  
Secondary Ion

ABSTRACTA secondary ion mass spectrometry (SIMS) system has been incorporated into the AT&T-BL second generation focused ion beam (FIB) micromachining system. The primary applications are end-point detection and topographical element mapping. End-point detection of Cr micromachining on photomasks was done with raster sizes ranging from 10 μm x 10 μm to 3 μm x 3 μm. SIMS end-points, total ions images, and transmitted light measurements show that the ion-milling can be controlled to stop prior to or after the Cr/glass interface. Mass selected secondary ion images have been obtained for high yield ions such as52Cr+ and27 A1+ on raster fields of 25 μm in time intervals ranging from 20 to 100 sec. Al+ SIMS images of 1 μm lines and spaces from a VLSI test pattern have been obtained.

scholarly journals Acid number, viscosity and end-point detection in a multiphase high temperature polymerisation process using an online miniaturised MEMS Fabry-Pérot interferometer

Talanta ◽  
2021 ◽  
Vol 224 ◽  
pp. 121735
Author(s):  
Claudio Avila ◽  
Christos Mantzaridis ◽  
Joan Ferré ◽  
Rodrigo Rocha de Oliveira ◽  
Uula Kantojärvi ◽  
...  
Keyword(s):  
High Temperature ◽  
Acid Number ◽  
End Point ◽  
Fabry Perot ◽  
End Point Detection ◽  
Point Detection

Fluoroimmunoassay for human choriomammotropin.

1979 ◽  
Vol 25 (6) ◽  
pp. 973-975 ◽  
Author(s):  
T Chard ◽  
A Sykes
Keyword(s):  
Equipment Design ◽  
Radiation Hazard ◽  
Human Origin ◽  
End Point ◽  
End Point Detection ◽  
Purified Antigen ◽  
Point Detection

Abstract We describe an immunoassay for human choriomammo-tropin by use of the fluorescein-labeled hormone (of human origin). The technique is generally similar to the radioimmunoassay for this material, but has the advantage of stability of tracer and avoidance of radiation hazard. However, the procedure requires approximately 50-fold more tracer than does the radioimmunoassay, and this would be a disadvantage with materials for which supplies of purified antigen are scarce. Furthermore, both within-assay variation (3.9%) and between-assay variation (7.8--7.9%) were less satisfactory than that of radioimmunoassay (1.5% and 2.2--3%, respectively). This is almost certainly the result of imprecision of end-point detection and could probably be corrected by further attention to equipment design.

AEROBIC END-POINT DETECTION IN A SEQUENCING BATCH REACTOR

2005 ◽  
Vol 38 (1) ◽  
pp. 115-120
Author(s):  
Hilario López García ◽  
Iván Machón González
Keyword(s):  
Sequencing Batch Reactor ◽  
Batch Reactor ◽  
End Point ◽  
End Point Detection ◽  
Point Detection

Optical end point detection of etched YBCO films

1992 ◽  
Vol 191 (3-4) ◽  
pp. 525-529 ◽  
Author(s):  
R. Dolata ◽  
M. Fischer ◽  
W. Jutzi
Keyword(s):  
Ybco Films ◽  
End Point ◽  
End Point Detection ◽  
Point Detection
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