Spatial distributions of electron density and temperature in audio frequency and radio frequency magnetron glow discharges
1994 ◽
Vol 12
(6)
◽
pp. 3115-3119
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2006 ◽
Vol 45
(12)
◽
pp. 9213-9215
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Keyword(s):
1989 ◽
Vol 50
(C1)
◽
pp. C1-559-C1-564
Keyword(s):
2009 ◽
Vol 24
(3)
◽
pp. 602-606
◽
2010 ◽
Vol 43
(50)
◽
pp. 505203
◽
Keyword(s):