Sputtered atom transport in high‐current gas discharges: A self‐consistent computer simulation study

1993 ◽  
Vol 11 (3) ◽  
pp. 676-681 ◽  
Author(s):  
Herbert M. Urbassek ◽  
Dieter Sibold
2007 ◽  
Vol 68 (3) ◽  
pp. 389-393 ◽  
Author(s):  
Guo-Xiang Chen ◽  
Jian-Min Zhang ◽  
Ke-Wei Xu ◽  
Vincent Ji

Sign in / Sign up

Export Citation Format

Share Document