Structural change of titanium oxide evaporated films during in situ heating in an electron microscope

1993 ◽  
Vol 11 (5) ◽  
pp. 2642-2648 ◽  
Author(s):  
Y. Yamada ◽  
I. Shiota ◽  
K. Yoshida
2008 ◽  
Vol 112 (39) ◽  
pp. 12297-12303 ◽  
Author(s):  
Xing Chen ◽  
Quan Cai ◽  
Wei Wang ◽  
Guang Mo ◽  
Longsheng Jiang ◽  
...  

2002 ◽  
Vol 8 (1) ◽  
pp. 16-20 ◽  
Author(s):  
S. Arai ◽  
K. Suzuki ◽  
H. Saka

Behavior of fine crystalline particles of W5Si3 on a β-Si3N4 substrate at high temperatures was observed by an in situ heating experiment in a transmission electron microscope. Some of the fine particles of W5Si3 moved in a to-and-fro manner.


Author(s):  
P.A. Labun ◽  
P.A. Crazier ◽  
T. Suzuki

Bi-substituted garnet films have attracted much attention as possible materials for high density magneto-optical recording media. Recently a new rapid thermal annealing technique has been developed to produce garnet films with improved microstructural and magnetic properties. We have employed in-situ heating in an analytical electron microscope to characterize the microstructural changes to the morphology and chemistry during thermal annealing of garnet films.Garnet films were produced by an r.f. magnetron sputter deposition method in an Ar atmosphere. The nominal composition of the films was (BiDy)3(FeGa)5O12 with a thickness of ∼ 40 nm. The films were transferred into the hot stage of a Philips 400T transmission electron microscope and heated to a maximum temperature of 720 C. Different rates were used to simulate the effect of heat pulsed annealing.


1999 ◽  
Vol 589 ◽  
Author(s):  
H. Saka ◽  
S. Arai ◽  
S. Muto ◽  
H. Miyai ◽  
S. Tsukimoto

AbstractMelting and solidification of metallic materials have been observed directly using an in-situ heating experiment in an electron microscope. In pure Al melting initiates at the surface, while in a eutectic alloy melting initiates preferentially at eutectic interfaces and grain boundaries. The atomic structure of a solidliquid interface was identified by comparing an experimental image with computed ones.


Author(s):  
Vidya S. Kaushik ◽  
Robert L. Hance ◽  
Charlotte L. Grove

In situ heating experiments in the transmission electron microscope offer unique opportunities to visualize and understand material behavior. The annealing behavior of silicon amorphized by conventional dopant implants as studied by in situ TEM has been reported in the literature. As part of a study on the behavior of fluorine in silicon, we have performed in situ anneals of fluorine-implanted amorphized silicon on XTEM samples, and compared these with bulk furnace-annealed samples.The wafer was an n-type (100) silicon (18-24 ohm-cm) implanted with 1 x 1016 /cm2 fluorine at 60 keV at room temperature through a 13 nm oxide layer. The XTEM samples were heated within the TEM in a Gatan sample holder in a JEOL 2000 FXII STEM operated at 200 kV. The behavior of the sample was observed using a wide angle CCD TV camera and recorded on videotape. Micrographs were recorded before the anneal and after the temperature had stabilized.


2009 ◽  
Vol 109 (11) ◽  
pp. 1326-1332 ◽  
Author(s):  
Li Wang ◽  
Yuan Ji ◽  
Bin Wei ◽  
Yinqi Zhang ◽  
Jingyong Fu ◽  
...  

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