Micromachined tunneling displacement transducers for physical sensors
1993 ◽
Vol 11
(4)
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pp. 797-802
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Keyword(s):
2020 ◽
Vol 12
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pp. 175682932092452
Keyword(s):
1991 ◽
Vol 44
(4)
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pp. 365-367
Keyword(s):
1968 ◽
Vol 4
(2)
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pp. 162-165
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Keyword(s):
2011 ◽
Vol 22
(2)
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pp. 191-200
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Keyword(s):
1980 ◽
Vol 13
(12)
◽
pp. 1280-1281
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