Surface damage threshold of Si and SiO2 in electron‐cyclotron‐resonance plasmas

1992 ◽  
Vol 10 (4) ◽  
pp. 1318-1324 ◽  
Author(s):  
Young H. Lee
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Damage Threshold ◽  
Surface Damage ◽  
Electron Cyclotron

Near‐surface damage and contamination of silicon following electron cyclotron resonance etching

1990 ◽  
Vol 8 (3) ◽  
pp. 2939-2944 ◽  
Author(s):  
A. S. Yapsir ◽  
G. Fortuño‐Wiltshire ◽  
J. P. Gambino ◽  
R. H. Kastl ◽  
C. C. Parks
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Surface Damage ◽  
Electron Cyclotron ◽  
Near Surface

Anisotropic electron cyclotron resonance etching of tungsten films on GaAs

1994 ◽  
Vol 30 (1) ◽  
pp. 84-85 ◽  
Author(s):  
R.J. Shul ◽  
D.J. Rieger ◽  
C. Constantine ◽  
A.G. Baca ◽  
C. Barratt
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron
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