Compositional dependence of grain size in silver copper alloys prepared by direct current magnetron sputtering

1992 ◽  
Vol 10 (6) ◽  
pp. 3445-3450 ◽  
Author(s):  
A. M. Kazakos ◽  
D. E. Fahnline ◽  
R. Messier ◽  
L. J. Pilione
Keyword(s):  
Grain Size ◽  
Magnetron Sputtering ◽  
Direct Current ◽  
Copper Alloys ◽  
Compositional Dependence ◽  
Silver Copper ◽  
Direct Current Magnetron Sputtering

Effects of Continuous and Discontinuous Deposition Time in Reactive Direct Current Magnetron Sputtering of Titanium Dioxide Thin Films

2015 ◽  
Vol 1131 ◽  
pp. 251-254
Author(s):  
Montri Aiempanakit ◽  
Chantana Salawan ◽  
Kamon Aiempanakit
Keyword(s):  
Thin Films ◽  
Grain Size ◽  
Surface Morphology ◽  
Magnetron Sputtering ◽  
Direct Current ◽  
Deposition Time ◽  
Spherical Shape ◽  
Contact Angles ◽  
Water Contact ◽  
Direct Current Magnetron Sputtering

The effect of continuous and discontinuous deposition time on the properties of TiO2 thin films deposited by reactive direct current magnetron sputtering (DCMS) on glass substrates was investigated. The deposition processes were designed for a condition of continuous deposition time D1 (60 min) and three conditions of discontinuous deposition time D2 (30 min × 2 times), D3 (15 min × 4 times), and D4 (1 min × 60 times). The crystal structure, surface morphology, and hydrophilicity of TiO2 thin films were characterized by X-ray diffraction, atomic force microscope, and water contact angle method, respectively. It was found that the increasing of discontinuous deposition time (conditions from D1 to D4) shows the changing of grain size from big grain size with spherical shape to small grain size with oval shape. The crystallinity of TiO2 films decrease with increasing the discontinuous deposition time. The water contact angles also decrease as a function of increasing discontinuous deposition time. These results may be explained from the accumulation of heat on the substrate which affected the phase composition and surface morphology of TiO2 thin films.

ZrCuAlNi thin film metallic glass grown by high power impulse and direct current magnetron sputtering

2021 ◽  
pp. 127029
Author(s):  
Niklas Bönninghoff ◽  
Wahyu Diyatmika ◽  
Jinn P. Chu ◽  
Stanislav Mráz ◽  
Jochen M. Schneider ◽  
...  
Keyword(s):  
Thin Film ◽  
Metallic Glass ◽  
Magnetron Sputtering ◽  
Direct Current ◽  
High Power ◽  
Direct Current Magnetron Sputtering

Synthesis and characterization of Cu3N–WC nanocomposite films prepared by direct current magnetron sputtering

2010 ◽  
Vol 518 (18) ◽  
pp. 5227-5232 ◽  
Author(s):  
Shihong Zhang ◽  
Yinsheng He ◽  
Mingxi Li ◽  
Yizhu He ◽  
Sikchol Kwon ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Direct Current ◽  
Nanocomposite Films ◽  
Synthesis And Characterization ◽  
Direct Current Magnetron Sputtering

Tungsten-doped ZnO transparent conducting films deposited by direct current magnetron sputtering

Vacuum ◽  
2010 ◽  
Vol 85 (2) ◽  
pp. 184-186 ◽  
Author(s):  
Huafu Zhang ◽  
Hanfa Liu ◽  
Chengxin Lei ◽  
Changkun Yuan ◽  
Aiping Zhou
Keyword(s):  
Magnetron Sputtering ◽  
Direct Current ◽  
Transparent Conducting Films ◽  
Transparent Conducting ◽  
Direct Current Magnetron Sputtering ◽  
Doped Zno

Effect of reflected Ar neutrals on tantalum diboride coatings prepared by direct current magnetron sputtering

2021 ◽  
pp. 127463
Author(s):  
K. Viskupová ◽  
B. Grančič ◽  
T. Roch ◽  
L. Satrapinskyy ◽  
M. Truchlý ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Direct Current ◽  
Direct Current Magnetron Sputtering
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