Quantification of surface film formation effects in fluorocarbon plasma etching of polysilicon
1991 ◽
Vol 9
(3)
◽
pp. 779-785
◽
The effect of surface film formation from thermal exposure on the ductility of Ti48Al1V0.2C (at%)
1992 ◽
Vol 27
(11)
◽
pp. 1663-1668
◽
1962 ◽
Vol 12
(1)
◽
pp. 91-105
◽
2008 ◽
Vol 49
(11)
◽
pp. 2479-2488
◽
Keyword(s):
2003 ◽
Vol 71
(12)
◽
pp. 1011-1017
◽
Keyword(s):
2019 ◽
Vol 7
(1)
◽
pp. 1901500
◽
1997 ◽
Vol 273
(5)
◽
pp. L907-L912
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