Surface‐defect formation in graphite targets during magnetron sputtering
1990 ◽
Vol 8
(4)
◽
pp. 3157-3162
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1996 ◽
Vol 11
(1)
◽
pp. 76-81
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Keyword(s):
2001 ◽
Vol 40
(Part 2, No. 10A)
◽
pp. L1051-L1053
Keyword(s):
1998 ◽
Vol 213
(9)
◽
2015 ◽
Vol 2015.8
(0)
◽
pp. _0515-1_-_0515-5_
◽
Keyword(s):