Low outgassing and anticorrosive metal surface treatment for ultrahigh vacuum equipment

1990 ◽  
Vol 8 (4) ◽  
pp. 3337-3340 ◽  
Author(s):  
Kazuhiko Sugiyama ◽  
Tadahiro Ohmi ◽  
Mizuho Morita ◽  
Yoshiyuki Nakahara ◽  
Nobuhiro Miki
Keyword(s):  
Surface Treatment ◽  
Metal Surface ◽  
Ultrahigh Vacuum ◽  
Vacuum Equipment

scholarly journals Control of Local Hardness Gradient of Metal Surface by Inclined Surface Treatment Using Ultrasonic Nanocrystal Surface Modification

2021 ◽  
Vol 8 (2) ◽  
pp. 533-546
Author(s):  
Yeong-Kwan Jo ◽  
Yeong-Wook Gil ◽  
Do-Sik Shim ◽  
Young-Sik Pyun ◽  
Sang-Hu Park
Keyword(s):  
Surface Modification ◽  
Surface Treatment ◽  
Metal Surface ◽  
Incident Angle ◽  
Surface Hardness ◽  
Parameter Study ◽  
Local Hardness ◽  
Practical Usefulness ◽  
Inclined Surface ◽  
Hardness Gradient

AbstractWe propose an effective method to control the local hardness and morphology of a metal surface by tilting the incident angle of a horn during ultrasonic nanocrystal surface modification (UNSM). In this study, surface treatment using UNSM was performed on an S45C specimen and a parameter study was conducted for optimization. The process parameters were the feeding rate, static load, striking force, and processing angle (Ф). In particular, the Ф was analyzed by tilting the horn by 0°, 10°, 20°, 30°, 40°, and 45° to understand its effect on surface hardness and changes in the morphology. From fundamental experiments, some important phenomena were observed, such as grain-microstructure changes along the processing and thickness directions. Furthermore, to verify the practical usefulness of this study, a flat and a hemispherical specimen of S45C material were treated using UNSM with various values of Ф. A significant change in hardness (an increase from 2–45%) and a gradual hardness gradient on the tested specimens could be easily realized by the proposed method. Therefore, we believe that the method is effective for controlling the mechanical hardness of a metal surface.

Characterization of Wafer Level Metal Thermo-Compression Bonding

2010 ◽  
Vol 2010 (DPC) ◽  
pp. 002326-002360
Author(s):  
Erkan Cakmak ◽  
Bioh Kim ◽  
Viorel Dragoi
Keyword(s):  
Surface Treatment ◽  
Metal Surface ◽  
Bonding Temperature ◽  
Transient Liquid Phase ◽  
Bonding Process ◽  
Bending Test ◽  
Strength Analysis ◽  
Mems Devices ◽  
Wafer Level ◽  
Bond Quality

The process of wafer-level bonding is being successfully used to form MEMS devices. Wafer level bonding may be realized by different methods such as thermo compression, transient liquid phase, anodic, glass frit, or polymer bonding. These methods have different requirements and the choice of wafer level bonding method is defined by the application type. Metal TCB has a wide variety of applications with materials of choice including Au, Cu and Al. 3D electrical connections are created by the use of Cu-Cu TCB; while CMOS MEMS devices may be realized by Al-Al TCB. In this study the wafer level bonding process of Cu-Cu and Al-Al TCB are characterized. The effects and significance of various bonding process parameters and surface treatment methods are reported on the final bond interfaces integrity and strength. Analysis methods include SAM, SEM, AFM, and four point bending test. Al-Al TCB samples were investigated on the interfacial adhesion energy and bond quality. IAE and bond quality were found to be positively correlated with bonding temperature. A bonding temperature of 500 °C or greater is necessary to obtain bond strengths of 8–10 J/m2. A positive relation between IAE and bonding temperature was observed for Cu-Cu TCB. IAE's of greater then 10 J/m2 were obtained on bonded samples that do not show a post bond residual seam on the bonding interface. An acid based pre treatment was shown to impact the surface properties of the initial metal surface hence affecting the IAE. Post bond annealing processes showed the most significant impact on the IAE of the Cu-Cu TCB system. To obtain comparable IAE values the Al-Al TCB method requires a higher bonding temperature. However the Cu-Cu TCB is sensitive to the initial metal surface condition and requires surface treatment processes prior to bonding to obtain high quality bonding results.

Characteristics of Adhesion According to Metal Surface Treatment in Metal Insert Molding

Polymer Korea ◽  
2017 ◽  
Vol 41 (4) ◽  
pp. 727-734
Author(s):  
Se Lyn Kim ◽  
Min-Young Lyu ◽  
Sung Woong Jang
Keyword(s):  
Surface Treatment ◽  
Metal Surface ◽  
Metal Insert ◽  
Insert Molding
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