A study of Pd–Ta on Si(100) using Auger electron spectroscopy, Rutherford backscattering spectrometry, and variable energy positron annihilation

1989 ◽  
Vol 7 (3) ◽  
pp. 1601-1607 ◽  
Author(s):  
G. J. van der Kolk ◽  
A. E. T. Kuiper ◽  
J. P. W. B. Duchateau ◽  
M. Willemsen ◽  
Bent Nielsen ◽  
...  
Keyword(s):  
Auger Electron Spectroscopy ◽  
Positron Annihilation ◽  
Electron Spectroscopy ◽  
Auger Electron ◽  
Rutherford Backscattering Spectrometry ◽  
Rutherford Backscattering ◽  
Variable Energy

Influence of Oxygen on the Iridium Silicide Formation by Rapid Thermal Annealing

1994 ◽  
Vol 299 ◽  
Author(s):  
M. Fernandez ◽  
T. Rodriguez ◽  
A. Almendra ◽  
J. Jimenez-Leube ◽  
H. Wolters
Keyword(s):  
Auger Electron Spectroscopy ◽  
Thermal Annealing ◽  
Rapid Thermal Annealing ◽  
Electron Spectroscopy ◽  
Auger Electron ◽  
Rutherford Backscattering Spectrometry ◽  
Rutherford Backscattering ◽  
Oxygen Effect ◽  
Silicide Formation

AbstractIridium silicide formation by rapid thermal annealing (RTA) in an Ar atmosphere or under vacuum has been investigated. The evolution of the silicide front and the identification of the phases were monitored by Auger Electron Spectroscopy (AES) and Rutherford Backscattering Spectrometry (RBS). Oxygen was incorporated during the RTA process in an Ar atmosphere. The oxygen effect is to slow down the silicide formation and eventually to stop it. In all the cases, the oxygen piled-up at the iridium-iridium silicide interface. No distinguishable phase was formed by RTA in an Ar atmosphere. No oxygen contarsi'nation was detected when the RTA was performed under a vacuum lower than 2×10−5 Torr. In this case Ir1Si1 and Ir1Si1.75 phases were formed.

scholarly journals PAES: Positron annihilation induced Auger electron spectrometer

2015 ◽  
Vol 1 ◽  
Author(s):  
Christoph Hugenschmidt
Keyword(s):  
Auger Electron Spectroscopy ◽  
Positron Annihilation ◽  
Electron Spectroscopy ◽  
Auger Electron ◽  
Electron Spectrometer ◽  
Surface Studies ◽  
Surface Sensitivity

Positron annihilation induced Auger electron spectroscopy (PAES) is a newly developed application for surface studies with high elemental selectivity and exceptional surface sensitivity. The instrument is operated by the Technische Universität München and is located at NEPOMUC.

Sign in / Sign up

Export Citation Format

Share Document