Growth of Al and Al nitride films in N2–Ne and N2–(Ne+Ar) discharges: Construction of a ternary gas phase diagram
1988 ◽
Vol 6
(3)
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pp. 1712-1716
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2009 ◽
Vol 45
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pp. 89-93
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2019 ◽
Vol 46
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pp. 065106
1974 ◽
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pp. 219-222
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2004 ◽
Vol 18
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pp. 2057-2069
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Keyword(s):
Keyword(s):
2007 ◽
Vol 80
(5)
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pp. 56002
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2009 ◽
Vol 156-158
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pp. 49-54
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2006 ◽
Vol 200
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pp. 5268-5276
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