Quantitative analysis and depth profiling of rare gases in solids by secondary‐ion mass spectrometry: Detection of (CsR)+ molecular ions (R=rare gas)

1988 ◽  
Vol 6 (1) ◽  
pp. 44-50 ◽  
Author(s):  
M. A. Ray ◽  
J. E. Baker ◽  
C. M. Loxton ◽  
J. E. Greene
Keyword(s):  
Mass Spectrometry ◽  
Quantitative Analysis ◽  
Secondary Ion Mass Spectrometry ◽  
Depth Profiling ◽  
Molecular Ions ◽  
Rare Gas ◽  
Rare Gases ◽  
Mass Spectrometry Detection ◽  
Ion Mass Spectrometry ◽  
Secondary Ion

Round-robin test for the measurement of layer thickness of multilayer films by secondary ion mass spectrometry depth profiling

2017 ◽  
Vol 49 (11) ◽  
pp. 1057-1063 ◽  
Author(s):  
Kyung Joong Kim ◽  
Jong Shik Jang ◽  
Joe Bennett ◽  
David Simons ◽  
Mario Barozzi ◽  
...  
Keyword(s):  
Mass Spectrometry ◽  
Layer Thickness ◽  
Secondary Ion Mass Spectrometry ◽  
Depth Profiling ◽  
Multilayer Films ◽  
Round Robin ◽  
Round Robin Test ◽  
Ion Mass Spectrometry ◽  
Secondary Ion
Sign in / Sign up

Export Citation Format

Share Document