Spherical oscillator gauge with field emission cold cathode

1987 ◽  
Vol 5 (4) ◽  
pp. 2376-2379 ◽  
Author(s):  
Wangkui Li ◽  
Dixin Zhang
Keyword(s):  
Field Emission ◽  
Cold Cathode ◽  
Spherical Oscillator

Development of a conical anode Fe-gun for low voltage SEM

1988 ◽  
Vol 46 ◽  
pp. 978-979
Author(s):  
T. Miyokawa ◽  
S. Norioka ◽  
S. Goto
Keyword(s):  
High Resolution ◽  
Field Emission ◽  
Low Voltage ◽  
Irradiation Damage ◽  
Cold Cathode ◽  
Virtual Source ◽  
Source Position ◽  
Electrostatic Lens ◽  
Electrostatic Lenses ◽  
Wide Range

Field emission SEMs (FE-SEMs) are becoming popular due to their high resolution needs. In the field of semiconductor product, it is demanded to use the low accelerating voltage FE-SEM to avoid the electron irradiation damage and the electron charging up on samples. However the accelerating voltage of usual SEM with FE-gun is limited until 1 kV, which is not enough small for the present demands, because the virtual source goes far from the tip in lower accelerating voltages. This virtual source position depends on the shape of the electrostatic lens. So, we investigated several types of electrostatic lenses to be applicable to the lower accelerating voltage. In the result, it is found a field emission gun with a conical anode is effectively applied for a wide range of low accelerating voltages.A field emission gun usually consists of a field emission tip (cold cathode) and the Butler type electrostatic lens.

Field Emission Cold Cathode Devices Based on Eutectic Systems

1981 ◽  
Author(s):  
Duncan Stewart ◽  
Vivian G. Rivlin ◽  
Paul D. Wilson
Keyword(s):  
Field Emission ◽  
Cold Cathode ◽  
Eutectic Systems

Pulse Field Emission Characteristics of Vertical Few-Layer Graphene Cold Cathode

2014 ◽  
Vol 61 (6) ◽  
pp. 1771-1775 ◽  
Author(s):  
Yu Zhang ◽  
Deliu Deng ◽  
Lijun Zhu ◽  
Shaozhi Deng ◽  
Jun Chen ◽  
...  
Keyword(s):  
Field Emission ◽  
Pulse Field ◽  
Emission Characteristics ◽  
Cold Cathode ◽  
Layer Graphene ◽  
Few Layer Graphene

Field emission from the cold cathode using CNTs dispersed in insulating layer

2012 ◽  
Author(s):  
Masahiro Yamashita ◽  
Yuji Asada ◽  
Tomohiko Yamakami ◽  
Rinpei Hayashibe ◽  
Kiichi Kamimura
Keyword(s):  
Field Emission ◽  
Cold Cathode ◽  
Insulating Layer
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