The determination of amorphous layer thickness in ion implanted silicon using secondary ion mass spectrometry

1986 ◽  
Vol 4 (6) ◽  
pp. 2492-2498 ◽  
Author(s):  
Howard E. Smith ◽  
G. H. Morrison ◽  
D. T. Hodul
Keyword(s):  
Mass Spectrometry ◽  
Layer Thickness ◽  
Secondary Ion Mass Spectrometry ◽  
Amorphous Layer ◽  
Ion Mass Spectrometry ◽  
Secondary Ion ◽  
Ion Implanted

SIMS Study of 30keV H+ Ion-Implanted n-GaAs

2011 ◽  
Vol 319-320 ◽  
pp. 181-184
Author(s):  
M. Sivabharathy ◽  
M. Jeyanthinath ◽  
Lasse Vines ◽  
Bengt Gunnar Svensson ◽  
K. Ramachandran
Keyword(s):  
Mass Spectrometry ◽  
Detailed Analysis ◽  
Secondary Ion Mass Spectrometry ◽  
Amorphous Layer ◽  
Thermal Parameters ◽  
Depth Profiles ◽  
Ion Mass Spectrometry ◽  
First Time ◽  
Secondary Ion ◽  
Ion Implanted

A detailed analysis on the depth profiles of 30 keV H+ ion implanted n-GaAs for various doses from 1014 to 1017 cm-2 was carried by using Secondary ion mass spectrometry (SIMS), to identify the buried amorphous layer. The results are correlated with Raman and XRD strain parameter studies. Various thermal parameters are computed for the 30 keV H+ ion implanted n-GaAs and SIMS study reported for the first time.

Round-robin test for the measurement of layer thickness of multilayer films by secondary ion mass spectrometry depth profiling

2017 ◽  
Vol 49 (11) ◽  
pp. 1057-1063 ◽  
Author(s):  
Kyung Joong Kim ◽  
Jong Shik Jang ◽  
Joe Bennett ◽  
David Simons ◽  
Mario Barozzi ◽  
...  
Keyword(s):  
Mass Spectrometry ◽  
Layer Thickness ◽  
Secondary Ion Mass Spectrometry ◽  
Depth Profiling ◽  
Multilayer Films ◽  
Round Robin ◽  
Round Robin Test ◽  
Ion Mass Spectrometry ◽  
Secondary Ion

Ion‐implanted selenium profiles in GaAs as measured by secondary ion mass spectrometry

1978 ◽  
Vol 32 (1) ◽  
pp. 15-17 ◽  
Author(s):  
A. Lidow ◽  
J. F. Gibbons ◽  
V. R. Deline ◽  
C. A. Evans
Keyword(s):  
Mass Spectrometry ◽  
Secondary Ion Mass Spectrometry ◽  
Ion Mass Spectrometry ◽  
Secondary Ion ◽  
Ion Implanted

scholarly journals Determination of Calcium in Steel by Secondary Ion Mass Spectrometry

1994 ◽  
Vol 80 (12) ◽  
pp. 902-907 ◽  
Author(s):  
Hiroyasu FUJIWARA ◽  
Nobutoshi MURAO ◽  
Eiji ICHISE
Keyword(s):  
Mass Spectrometry ◽  
Secondary Ion Mass Spectrometry ◽  
Ion Mass Spectrometry ◽  
Secondary Ion
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