Auger electron spectroscopy and sputter/Auger analyses of thin films of SiCx

P. Morgen; K. L. Seaward; T. W. Barbee

doi:10.1116/1.573262

Auger electron spectroscopy and sputter/Auger analyses of thin films of SiCx

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.573262 ◽

1985 ◽

Vol 3 (6) ◽

pp. 2108-2115 ◽

Cited By ~ 14

Author(s):

P. Morgen ◽

K. L. Seaward ◽

T. W. Barbee

Keyword(s):

Thin Films ◽

Auger Electron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron

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A correlation of Auger electron spectroscopy, x‐ray photoelectron spectroscopy, and Rutherford backscattering spectrometry measurements on sputter‐deposited titanium nitride thin films

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.574092 ◽

1986 ◽

Vol 4 (6) ◽

pp. 2463-2469 ◽

Cited By ~ 104

Author(s):

Brad J. Burrow ◽

Alan E. Morgan ◽

Russell C. Ellwanger

Keyword(s):

Thin Films ◽

Titanium Nitride ◽

Auger Electron Spectroscopy ◽

Photoelectron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Rutherford Backscattering Spectrometry ◽

Rutherford Backscattering ◽

X Ray ◽

Sputter Deposited

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The use of Auger electron spectroscopy to characterize impurity effects in thin films

Thin Solid Films ◽

10.1016/0040-6090(78)90366-8 ◽

1978 ◽

Vol 53 (1) ◽

pp. 29-30 ◽

Cited By ~ 1

Author(s):

C.A. Evans ◽

R.J. Blattner

Keyword(s):

Thin Films ◽

Auger Electron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Impurity Effects

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Studies of the Factors Affecting the Analysis of Thin Films and Surfaces Using Auger Electron Spectroscopy.

10.21236/ada042192 ◽

1977 ◽

Author(s):

J. T. Grant

Keyword(s):

Thin Films ◽

Auger Electron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Factors Affecting

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Evaluation of I-III-VI 2 Thin Films and Photovoltaic Devices by Auger Electron Spectroscopy

Photovoltaic Solar Energy Conference ◽

10.1007/978-94-009-9840-7_134 ◽

1978 ◽

pp. 1309-1322 ◽

Cited By ~ 1

Author(s):

L. L. Kazmerski ◽

R. B. Cooper ◽

F. R. White ◽

D. W. Morton ◽

D. L. Sprague

Keyword(s):

Thin Films ◽

Auger Electron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Photovoltaic Devices

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Analysis of Surfaces and Thin Films by Using Auger Electron Spectroscopy and X-ray Photoelectron Spectroscopy

Journal of the Korean Physical Society ◽

10.3938/jkps.51.925 ◽

2007 ◽

Vol 51 (3) ◽

pp. 925 ◽

Cited By ~ 3

Author(s):

John T. Grant

Keyword(s):

Thin Films ◽

Auger Electron Spectroscopy ◽

Photoelectron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

X Ray

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Nonlinear composition dependence of x-ray photoelectron spectroscopy and Auger electron spectroscopy features in plasma-deposited zirconium silicate alloy thin films

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.1493788 ◽

2002 ◽

Vol 20 (4) ◽

pp. 1748 ◽

Cited By ~ 88

Author(s):

G. B. Rayner ◽

D. Kang ◽

Y. Zhang ◽

G. Lucovsky

Keyword(s):

Thin Films ◽

Auger Electron Spectroscopy ◽

Photoelectron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Composition Dependence ◽

X Ray ◽

Zirconium Silicate

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3911. Electrical properties of lead-zirconate-lead-titanate ferroelectric thin films and their composition analysis by Auger electron spectroscopy. (USA)

Vacuum ◽

10.1016/s0042-207x(79)80799-x ◽

1979 ◽

Vol 29 (4-5) ◽

pp. 190

Keyword(s):

Thin Films ◽

Electrical Properties ◽

Auger Electron Spectroscopy ◽

Lead Titanate ◽

Electron Spectroscopy ◽

Auger Electron ◽

Lead Zirconate ◽

Ferroelectric Thin Films ◽

Composition Analysis

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Characterization of Oxygen Vacancies in SrTiO3 Thin Films by Auger Electron Spectroscopy and Its Application to Leakage Current Reduction of Ru/SrTiO3/Ru Capacitor

10.7567/ssdm.2001.b-10-3 ◽

2001 ◽

Author(s):

S. Niwa ◽

S. Yamazaki ◽

M. Kiyotoshi ◽

J. Nakahira ◽

M. Nakabayashi ◽

...

Keyword(s):

Thin Films ◽

Auger Electron Spectroscopy ◽

Leakage Current ◽

Electron Spectroscopy ◽

Auger Electron ◽

Oxygen Vacancies ◽

Current Reduction

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Sputtered metal-silicon thin films studied by auger electron spectroscopy

Applied Surface Science ◽

10.1016/0169-4332(85)90208-9 ◽

1985 ◽

Vol 24 (1) ◽

pp. 11-17 ◽

Cited By ~ 3

Author(s):

R. Payling ◽

G.L. Harding ◽

S. Craig

Keyword(s):

Thin Films ◽

Auger Electron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Silicon Thin Films

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Auger electron spectroscopy analysis of oxidation states of Te in amorphous CdTe oxide thin films

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.580766 ◽

1997 ◽

Vol 15 (5) ◽

pp. 2537-2541 ◽

Cited By ~ 14

Author(s):

A. Zapata-Navarro ◽

P. Bartolo-Pérez ◽

M. Zapata-Torres ◽

R. Castro-Rodriguez ◽

J. L. Peña ◽

...

Keyword(s):

Thin Films ◽

Auger Electron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Oxidation States ◽

Oxide Thin Films ◽

Spectroscopy Analysis ◽

Auger Electron Spectroscopy Analysis

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