Computer simulation of line edge profiles undergoing ion bombardment

I. W. Rangel/ow

doi:10.1116/1.571932

Computer simulation of line edge profiles undergoing ion bombardment

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.571932 ◽

1983 ◽

Vol 1 (2) ◽

pp. 410-414 ◽

Cited By ~ 16

Author(s):

I. W. Rangel/ow

Keyword(s):

Computer Simulation ◽

Ion Bombardment

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Evolution of well-defined surface contour submitted to ion bombardment: computer simulation and experimental investigation

Journal of Materials Science ◽

10.1007/bf00541031 ◽

1975 ◽

Vol 10 (1) ◽

pp. 52-62 ◽

Cited By ~ 96

Author(s):

J. P. Ducommun ◽

M. Cantagrel ◽

M. Moulin

Keyword(s):

Experimental Investigation ◽

Computer Simulation ◽

Ion Bombardment ◽

Surface Contour

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Computer simulation of chemical erosion of graphite due to hydrogen ion bombardment

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/s0168-583x(02)01857-8 ◽

2003 ◽

Vol 202 ◽

pp. 195-200 ◽

Cited By ~ 6

Author(s):

J.H. Liang ◽

M. Mayer ◽

J. Roth ◽

W. Eckstein

Keyword(s):

Computer Simulation ◽

Ion Bombardment ◽

Hydrogen Ion ◽

Chemical Erosion

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Computer simulation of the surface composition change of a Cu-Ni alloy under ion bombardment at different sample temperatures

Surface Science ◽

10.1016/0039-6028(91)90015-k ◽

1991 ◽

Vol 255 (1-2) ◽

pp. 120-126 ◽

Cited By ~ 7

Author(s):

Kurokawa Akira ◽

Hee Jae Kang ◽

Shimizu Ryuichi

Keyword(s):

Computer Simulation ◽

Surface Composition ◽

Ion Bombardment ◽

Composition Change ◽

Ni Alloy

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Computer Simulation of Pit Formation in Metals by Ion Bombardment

Physical Review Letters ◽

10.1103/physrevlett.50.1478 ◽

1983 ◽

Vol 50 (19) ◽

pp. 1478-1481 ◽

Cited By ~ 40

Author(s):

R. P. Webb ◽

D. E. Harrison

Keyword(s):

Computer Simulation ◽

Ion Bombardment ◽

Pit Formation

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Molecular Dynamics Computer Simulation Study of the Damage Produced in Metal Target Surfaces During Ion Bombardment

Springer Series in Chemical Physics - Secondary Ion Mass Spectrometry SIMS IV ◽

10.1007/978-3-642-82256-8_7 ◽

1984 ◽

pp. 24-30 ◽

Cited By ~ 3

Author(s):

D. E. Harrison ◽

W. A. Mason ◽

R. P. Webb

Keyword(s):

Molecular Dynamics ◽

Computer Simulation ◽

Simulation Study ◽

Ion Bombardment ◽

Metal Target ◽

Computer Simulation Study

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Computer simulation of atomic mixing during ion bombardment

Applied Physics ◽

10.1007/bf00883758 ◽

1975 ◽

Vol 6 (2) ◽

pp. 241-248 ◽

Cited By ~ 122

Author(s):

T. Ishitani ◽

R. Shimizu

Keyword(s):

Computer Simulation ◽

Ion Bombardment ◽

Atomic Mixing

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Computer simulation of ion bombardment collision cascades

Radiation Effects ◽

10.1080/00337577808242094 ◽

1978 ◽

Vol 37 (1-2) ◽

pp. 113-120 ◽

Cited By ~ 101

Author(s):

R. S. Walker ◽

D. A. Thompson

Keyword(s):

Computer Simulation ◽

Ion Bombardment

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Computer simulation of sputtering and implantation processes under grazing ion bombardment of binary crystal surface

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/s0168-583x(99)00214-1 ◽

1999 ◽

Vol 153 (1-4) ◽

pp. 326-330 ◽

Cited By ~ 7

Author(s):

A.A. Dzhurakhalov ◽

I.I. Khafizov

Keyword(s):

Computer Simulation ◽

Crystal Surface ◽

Ion Bombardment

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Computer simulation of ion-bombardment induced sputtering of Rh(111) surface

Vacuum ◽

10.1016/0042-207x(89)91104-4 ◽

1989 ◽

Vol 39 (11-12) ◽

pp. 1123-1126 ◽

Cited By ~ 1

Author(s):

IR Chakarov ◽

DS Karpuzov ◽

SS Todorov

Keyword(s):

Computer Simulation ◽

Ion Bombardment

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Computer simulation of sputter broadening due to ion bombardment in Au-Ag thin film couple depth profiling

International Journal of Electronics ◽

10.1080/00207219208925750 ◽

1992 ◽

Vol 73 (5) ◽

pp. 977-979 ◽

Cited By ~ 1

Author(s):

I. L. SCHWARZMANN ◽

M. G. GOLDINER ◽

O. I. PLAKHOTNIKOV

Keyword(s):

Thin Film ◽

Computer Simulation ◽

Depth Profiling ◽

Ion Bombardment

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