Summary Abstract: Epitaxy: Its role in compound semiconductor device technology

J. M. Woodall

doi:10.1116/1.571440

Summary Abstract: Epitaxy: Its role in compound semiconductor device technology

Journal of Vacuum Science and Technology ◽

10.1116/1.571440 ◽

1982 ◽

Vol 20 (3) ◽

pp. 730-731

Author(s):

J. M. Woodall

Keyword(s):

Semiconductor Device ◽

Compound Semiconductor ◽

Device Technology

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Rapid Thermal Processing of Contacts and Buffer Layers for Compound Semiconductor Device Technology

Advances in Rapid Thermal and Integrated Processing ◽

10.1007/978-94-015-8711-2_18 ◽

1996 ◽

pp. 493-520 ◽

Cited By ~ 1

Author(s):

Ting Feng ◽

Aris Christou ◽

D. Girginoudi ◽

Z. Hatzopoulos

Keyword(s):

Thermal Processing ◽

Semiconductor Device ◽

Rapid Thermal Processing ◽

Compound Semiconductor ◽

Buffer Layers ◽

Device Technology

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Session 17 Solid state devices—Compound semiconductor device technology

10.1109/iedm.1980.189858 ◽

1980 ◽

Author(s):

H.C. Nathanson

Keyword(s):

Solid State ◽

Semiconductor Device ◽

Compound Semiconductor ◽

Solid State Devices ◽

Device Technology

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Rutherford scattering analysis: a tool for semiconductor-device technology

IEE Journal on SolidState and Electron Devices ◽

10.1049/ij-ssed.1977.0001 ◽

1977 ◽

Vol 1 (2) ◽

pp. 37 ◽

Cited By ~ 4

Author(s):

D.V. Morgan

Keyword(s):

Semiconductor Device ◽

Rutherford Scattering ◽

Device Technology

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Fundamentals and the Future of Semiconductor Device Technology

III-V Compound Semiconductors ◽

10.1201/b10390-5 ◽

2016 ◽

pp. 13-60

Keyword(s):

Semiconductor Device ◽

The Future ◽

Device Technology

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Semiconductor Device Technology

10.1007/978-1-349-17084-5 ◽

1983 ◽

Cited By ~ 8

Author(s):

Malcolm E. Goodge

Keyword(s):

Semiconductor Device ◽

Device Technology

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Silicon Nitride in Semiconductor Device Technology

Materials Science Forum ◽

10.4028/www.scientific.net/msf.47.228 ◽

1991 ◽

Vol 47 ◽

pp. 228-248 ◽

Cited By ~ 7

Author(s):

M. Arienzo ◽

W.A. Orr-Arienzo

Keyword(s):

Silicon Nitride ◽

Semiconductor Device ◽

Device Technology

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Application of Preferential Electrochemical Etching of Silicon to Semiconductor Device Technology

Journal of The Electrochemical Society ◽

10.1149/1.2407698 ◽

1970 ◽

Vol 117 (7) ◽

pp. 959 ◽

Cited By ~ 32

Author(s):

M. J. J. Theunissen ◽

J. A. Appels ◽

W. H. C. G. Verkuylen

Keyword(s):

Semiconductor Device ◽

Electrochemical Etching ◽

Device Technology

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Stabilized Fused‐Quartz Tubes with Reduced Sodium Diffusion for Semiconductor Device Technology

Journal of The Electrochemical Society ◽

10.1149/1.2131646 ◽

1978 ◽

Vol 125 (7) ◽

pp. 1188-1190 ◽

Cited By ~ 3

Author(s):

K. M. Eisele ◽

R. Ruthardt

Keyword(s):

Semiconductor Device ◽

Fused Quartz ◽

Sodium Diffusion ◽

Device Technology ◽

Quartz Tubes

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ChemInform Abstract: THE PREPARATION AND PROPERTIES OF CVD-SILICON TUBES AND BOATS FOR SEMICONDUCTOR DEVICE TECHNOLOGY

Chemischer Informationsdienst ◽

10.1002/chin.197447020 ◽

1974 ◽

Vol 5 (47) ◽

pp. no-no

Author(s):

W. DIETZE ◽

L. P. HUNT ◽

D. H. SAWYER

Keyword(s):

Semiconductor Device ◽

Silicon Tubes ◽

Device Technology

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Advances in silicon semiconductor device technology for radio and wireless applications

Radio and Wireless Conference, 2003. RAWCON '03. Proceedings ◽

10.1109/rawcon.2003.1227965 ◽

2004 ◽

Author(s):

L.E. Larson

Keyword(s):

Semiconductor Device ◽

Wireless Applications ◽

Device Technology

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Summary Abstract: Epitaxy: Its role in compound semiconductor device technology

Rapid Thermal Processing of Contacts and Buffer Layers for Compound Semiconductor Device Technology

Session 17 Solid state devices&#8212;Compound semiconductor device technology

Rutherford scattering analysis: a tool for semiconductor-device technology

Fundamentals and the Future of Semiconductor Device Technology

Semiconductor Device Technology

Silicon Nitride in Semiconductor Device Technology

Application of Preferential Electrochemical Etching of Silicon to Semiconductor Device Technology

Stabilized Fused‐Quartz Tubes with Reduced Sodium Diffusion for Semiconductor Device Technology

ChemInform Abstract: THE PREPARATION AND PROPERTIES OF CVD-SILICON TUBES AND BOATS FOR SEMICONDUCTOR DEVICE TECHNOLOGY

Advances in silicon semiconductor device technology for radio and wireless applications

Session 17 Solid state devices—Compound semiconductor device technology