Characterization of aluminum–aluminum nitride coatings sputter deposited using the pulsed gas process
1982 ◽
Vol 20
(3)
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pp. 462-465
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1996 ◽
Vol 54
◽
pp. 636-637
1990 ◽
Vol 48
(4)
◽
pp. 214-215
Keyword(s):
2001 ◽
Vol 81
(2)
◽
pp. 261-273
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