Summary Abstract: Difluorocarbene emission spectra from fluorocarbon plasmas and its relationship to fluorocarbon polymer formation
1981 ◽
Vol 18
(2)
◽
pp. 343-344
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1982 ◽
Vol 129
(1)
◽
pp. 160-165
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2001 ◽
Vol 19
(3)
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pp. 871-877
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1994 ◽
Vol 52
◽
pp. 728-729
1980 ◽
Vol 41
(12)
◽
pp. 1431-1436
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1979 ◽
Vol 40
(C2)
◽
pp. C2-417-C2-419
Keyword(s):
1974 ◽
Vol 35
(C6)
◽
pp. C6-324-C6-324
Keyword(s):
1987 ◽
Vol 48
(C9)
◽
pp. C9-1059-C9-1062