Ultrathin metal oxide layers by reactive sputtering: their controlled deposition and characterization
1979 ◽
Vol 16
(2)
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pp. 303-306
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Keyword(s):
2002 ◽
Vol 19
(10)
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pp. 1480-1482
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Keyword(s):
2015 ◽
Vol 25
(44)
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pp. 6921-6926
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Keyword(s):
1994 ◽
Vol 58
(6)
◽
pp. 557-562
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