Self‐consistent proximity effect correction technique for resist exposure (SPECTRE)

1978 ◽  
Vol 15 (3) ◽  
pp. 931-933 ◽  
Author(s):  
Mihir Parikh
Keyword(s):  
Proximity Effect ◽  
Correction Technique ◽  
Self Consistent ◽  
Proximity Effect Correction

Fabrication of Si photonic waveguides by electron beam lithography using improved proximity effect correction

2020 ◽  
Vol 59 (12) ◽  
pp. 126502
Author(s):  
Moataz Eissa ◽  
Takuya Mitarai ◽  
Tomohiro Amemiya ◽  
Yasuyuki Miyamoto ◽  
Nobuhiko Nishiyama
Keyword(s):  
Electron Beam ◽  
Proximity Effect ◽  
Electron Beam Lithography ◽  
Photonic Waveguides ◽  
Proximity Effect Correction

Proximity effect correction for reticle fabrication

2000 ◽  
Author(s):  
Masao Sugiyama ◽  
Shinji Kubo ◽  
Koji Hiruta ◽  
Takayuki Iwamatsu ◽  
Tatsuya Fujisawa ◽  
...  
Keyword(s):  
Proximity Effect ◽  
Proximity Effect Correction

Proximity effect correction by the GHOST method using a scattering stencil mask

1999 ◽  
Vol 17 (6) ◽  
pp. 2860 ◽  
Author(s):  
Hiroshi Yamashita ◽  
Eiichi Nomura ◽  
Shoko Manako ◽  
Hideo Kobinata ◽  
Ken Nakajima ◽  
...  
Keyword(s):  
Proximity Effect ◽  
Stencil Mask ◽  
Proximity Effect Correction
Sign in / Sign up

Export Citation Format

Share Document