Possibilities and limitations of large‐scale electron‐beam evaporation

1975 ◽  
Vol 12 (4) ◽  
pp. 800-806 ◽  
Author(s):  
S. Schiller ◽  
H. Foerster ◽  
G. Jaesch
Keyword(s):  
Electron Beam ◽  
Large Scale ◽  
Electron Beam Evaporation

Evolution of the microstructure of Cu(Ti)/SiO2 layers annealed in NH3

1995 ◽  
Vol 53 ◽  
pp. 452-453
Author(s):  
J. Liu ◽  
N. D. Theodore ◽  
D. Adams ◽  
S. Russell ◽  
T. L. Alford ◽  
...  
Keyword(s):  
Thermal Stability ◽  
Titanium Nitride ◽  
Large Scale ◽  
Standard Procedure ◽  
Alloy Film ◽  
Electron Beam Evaporation ◽  
Copper Metallization ◽  
Nominal Composition ◽  
Ti Alloy ◽  
Thermally Grown

Copper-based metallization has recently attracted extensive research because of its potential application in ultra-large-scale integration (ULSI) of semiconductor devices. The feasibility of copper metallization is, however, limited due to its thermal stability issues. In order to utilize copper in metallization systems diffusion barriers such as titanium nitride and other refractory materials, have been employed to enhance the thermal stability of copper. Titanium nitride layers can be formed by annealing Cu(Ti) alloy film evaporated on thermally grown SiO2 substrates in an ammonia ambient. We report here the microstructural evolution of Cu(Ti)/SiO2 layers during annealing in NH3 flowing ambient.The Cu(Ti) films used in this experiment were prepared by electron beam evaporation onto thermally grown SiO2 substrates. The nominal composition of the Cu(Ti) alloy was Cu73Ti27. Thermal treatments were conducted in NH3 flowing ambient for 30 minutes at temperatures ranging from 450°C to 650°C. Cross-section TEM specimens were prepared by the standard procedure.

An investigation of the structure of Nb/Si composite films formed by electron beam evaporation

1985 ◽  
Vol 131 (3-4) ◽  
pp. 261-266 ◽  
Author(s):  
M. Denhoff ◽  
B. Heinrich ◽  
A.E. Curzon ◽  
S. Gygax
Keyword(s):  
Electron Beam ◽  
Composite Films ◽  
Electron Beam Evaporation

Hard and superhard TiAlBN coatings deposited by twin electron-beam evaporation

2007 ◽  
Vol 201 (13) ◽  
pp. 6078-6083 ◽  
Author(s):  
C. Rebholz ◽  
M.A. Monclus ◽  
M.A. Baker ◽  
P.H. Mayrhofer ◽  
P.N. Gibson ◽  
...  
Keyword(s):  
Electron Beam ◽  
Electron Beam Evaporation

scholarly journals Application of Novel Non-Thermal Physical Technologies to Degrade Mycotoxins

2021 ◽  
Vol 7 (5) ◽  
pp. 395
Author(s):  
Mohammad Yousefi ◽  
Masoud Aman Mohammadi ◽  
Maryam Zabihzadeh Khajavi ◽  
Ali Ehsani ◽  
Vladimír Scholtz
Keyword(s):  
Electron Beam ◽  
Food Systems ◽  
Large Scale ◽  
Plasma Electron ◽  
Pulsed Light ◽  
Beam Radiation ◽  
Practical Applications ◽  
Electron Beam Radiation ◽  
Non Thermal Plasma ◽  
Agriculture And Food

Mycotoxins cause adverse effects on human health. Therefore, it is of the utmost importance to confront them, particularly in agriculture and food systems. Non-thermal plasma, electron beam radiation, and pulsed light are possible novel non-thermal technologies offering promising results in degrading mycotoxins with potential for practical applications. In this paper, the available publications are reviewed—some of them report efficiency of more than 90%, sometimes almost 100%. The mechanisms of action, advantages, efficacy, limitations, and undesirable effects are reviewed and discussed. The first foretastes of plasma and electron beam application in the industry are in the developing stages, while pulsed light has not been employed in large-scale application yet.

Liquid-phase metal vapor chemistry: rotary reactors and electron-beam evaporation sources

1990 ◽  
Vol 29 (5) ◽  
pp. 1068-1073 ◽  
Author(s):  
G. A. Ozin ◽  
Mark P. Andrews ◽  
C. G. Francis ◽  
H. X. Huber ◽  
K. Molnar
Keyword(s):  
Electron Beam ◽  
Liquid Phase ◽  
Metal Vapor ◽  
Electron Beam Evaporation

Large scale purification of metallurgical silicon for solar cell by using electron beam melting

2012 ◽  
Vol 351 (1) ◽  
pp. 19-22 ◽  
Author(s):  
Tong Liu ◽  
Zhiyuan Dong ◽  
Youwen Zhao ◽  
Jun Wang ◽  
Teng Chen ◽  
...  
Keyword(s):  
Electron Beam ◽  
Solar Cell ◽  
Electron Beam Melting ◽  
Large Scale ◽  
Metallurgical Silicon

AlN thin films fabricated by ultra-high vacuum electron-beam evaporation with ammonia for silicon-on-insulator application

2005 ◽  
Vol 239 (3-4) ◽  
pp. 327-334 ◽  
Author(s):  
Ming Zhu ◽  
Peng Chen ◽  
Ricky K.Y. Fu ◽  
Weili Liu ◽  
Chenglu Lin ◽  
...  
Keyword(s):  
Thin Films ◽  
Electron Beam ◽  
High Vacuum ◽  
Electron Beam Evaporation ◽  
Silicon On Insulator ◽  
Ultra High Vacuum

Soft-X-ray spectra of highly charged Au ions in an electron-beam ion trap

2001 ◽  
Vol 79 (2-3) ◽  
pp. 153-162 ◽  
Author(s):  
E Träbert ◽  
P Beiersdorfer ◽  
K B Fournier ◽  
S B Utter ◽  
K L Wong
Keyword(s):  
Electron Beam ◽  
Beam Energy ◽  
Large Scale ◽  
Ion Trap ◽  
Electron Beam Energy ◽  
X Ray ◽  
Maximum Charge ◽  
Electron Beam Ion Trap ◽  
Atomic Structure Calculations ◽  
Structure Calculations

Systematic variation of the electron-beam energy in an electron-beam ion trap has been employed to produce soft-X-ray spectra (20 to 60 Å) of Au with well-defined maximum charge states ranging from Br- to Co-like ions. Guided by large-scale relativistic atomic structure calculations, the strongest Δn = 0 (n = 4 to n' = 4) transitions in Rb- to Cu-like ions (Au42+ – Au50+) have been identified. PACS Nos.: 32.30Rj, 39.30+w, 31.50+w, 32.20R

Sign in / Sign up

Export Citation Format

Share Document