Electrical resistivity and mechanical properties of nitrogen-containing diamondlike carbon/tungsten and nitrogen-containing diamondlike carbon/tungsten carbide multilayer films prepared under low substrate temperature

2020 ◽  
Vol 38 (1) ◽  
pp. 011801
Author(s):  
Koki Tamekuni ◽  
Toru Harigai ◽  
Takafumi Toya ◽  
Hirofumi Takikawa ◽  
Tsuyoshi Tanimoto ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Electrical Resistivity ◽  
Substrate Temperature ◽  
Tungsten Carbide ◽  
Multilayer Films ◽  
Diamondlike Carbon

Microstructure, Interface and Hardness of Ti/TiN Nanolayered Coatings

2012 ◽  
Vol 531-532 ◽  
pp. 645-650 ◽  
Author(s):  
Xiao Ming Bai ◽  
Wei Tao Zheng ◽  
Xiu Juan Guo ◽  
Hui She
Keyword(s):  
Mechanical Properties ◽  
Grain Size ◽  
Substrate Temperature ◽  
Multilayer Coating ◽  
Multilayer Films ◽  
Deposition Pressure ◽  
Crystalline Orientation ◽  
X Ray ◽  
Modulus Difference ◽  
Discharge Gas

The polycrystalline Ti/TiN multilayer films were deposited by magnetron sputtering. We investigated the effects of mixed discharge gas pressure, bias voltage and substrate temperature on the microstructural, interfacial, and mechanical properties of the polycrystalline Ti/TiN multilayer films. X-ray reflectivity and diffraction (XRR and XRD), and nanoindentation were used to characterize the structures and mechanical properties for the films.The period of multilayer, interface width and grain size decrease with increaseing of deposition pressure. The multilayer coating at floating voltage shows TiN (111), Ti2N (103), and TiN (200) preferred crystalline orientation, whlie those at other different substrate biases show only TiN (111) and Ti2N (103) preferred crystalline orientation. It was found that the hardness increased with increasing substrate temperature. This hardness enhancement was probably caused by the modulus difference in the interface between layer Ti and TiN or the preferred crystalline orientation TiN(111).

Technological Parameters and Electrical Properties of Ti/TiN Multilayer Films Prepared by Magnetron Sputtering

2010 ◽  
Vol 654-656 ◽  
pp. 1752-1755
Author(s):  
Min Hu ◽  
Ying Liu ◽  
Zhen Quan Lai
Keyword(s):  
Electrical Resistivity ◽  
Electrical Properties ◽  
Magnetron Sputtering ◽  
Substrate Temperature ◽  
Sheet Resistance ◽  
Current Density ◽  
Multilayer Films ◽  
Technological Parameters ◽  
Modulation Period ◽  
Number Of Cycles

A series of Ti/TiN multilayer films was deposited on Si substrates by DC reactive magnetron sputtering process. The influence of sputtering current density and substrate temperature on cycle membrane structure and its electrical properties was investigated in this study. The results show that: when the current density is 0.4A, the sheet resistance and electrical resistivity of the film are of the minimum value. The sheet resistance and electrical resistivity of the film decrease with an increase of substrate temperature. Therefore, sputtering current density should be controlled between 0.3-0.4A, while the substrate temperature should be above 400°C. For a given modulation period and modulation ratio, with the change of number of cycles the films can present a unique set of colours, and its electrical resistivity decreases with an increase in the number of cycles. When the number of cycles is greater than 4, the sheet resistance is significantly reduced, and when the number is greater than 15, the prepared films come off. To keep the number of cycles at five and change the modulation period, it is shown that a minimum electrical resistivity exists.

Effect of Tin Oxide Coatings by Spray Pyrolysis Process on Mechanical Properties of Aluminium, Brass and Mild Steel

2021 ◽  
Vol 13 (2) ◽  
Author(s):  
M. Shunmugasundaram ◽  
A. Praveenkumar ◽  
L. Ponraj Sankar ◽  
S. Sivasankar
Keyword(s):  
Mechanical Properties ◽  
Mild Steel ◽  
Substrate Temperature ◽  
Spray Pyrolysis ◽  
Tin Oxide ◽  
Microstructural Analysis ◽  
Solution Concentration ◽  
Solution Flow Rate ◽  
Spray Pyrolysis Method ◽  
Solution Flow

Mechanical properties of materials are enhanced by different methods to increase the usage of the materials. In this research spray pyrolysis method is employed to increase the mechanical characteristics of three different materials. The tin oxide is chosen as coated material and aluminium, brass, mild steel are selected as substrate materials. The 500nm thin film is developed over the substrate materials by spray pyrolysis. The substrate temperature are chosen as 300? C for aluminium, 400? C for brass and mildsteel. Nozzle to substrate distance is 0.4 m, substrate temperature is 300? C for aluminium and 400? C for solution concentration as 0.2 mole and solution flow rate is 1ml/min are selected for constant deposition parameters. The hardness and tensile strength result clearly shows that strength is increased by adding the coating over the surface. The material is heated above crystallization temperature and SnO2 increases the tensile and hardness strength of the materials. The triangular metrological microscope is used to examine the microstructure of non coated and coated substrate materials. The microstructural analysis is showed that the uncoated surface of the substrate material is full of rough and pores. And displays that the tin oxide coated surface of the substrates after the initial deposition disclosed a surface with a agglomeration of tin oxide in homogeneous and uniform than the uncoated substrates.

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