Thick film hydrogen silsesquioxane planarization for passive component technology associated with electronic-photonic integrated circuits
2019 ◽
Vol 37
(6)
◽
pp. 061210
1976 ◽
Vol 34
◽
pp. 456-457
2006 ◽
Vol 12
(6)
◽
pp. 1164-1174
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