Increase of space width roughness in directed self-assembly patterning arising from shrinking stress in the remaining poly(methyl methacrylate)
2019 ◽
Vol 37
(5)
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pp. 051208
2019 ◽
Vol 553
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pp. 512-523
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2004 ◽
Vol 126
(19)
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pp. 6124-6134
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Keyword(s):
2014 ◽
Vol 13
(3)
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pp. 031304
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2012 ◽
Vol 4
(5)
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pp. 2630-2636
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2005 ◽
Vol 127
(28)
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pp. 9950-9951
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2016 ◽
Vol 294
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pp. 1857-1863
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2016 ◽
Vol 11
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pp. 633-639
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