Homologous substrate-temperature dependence of structure and properties of TiO2, ZrO2, and HfO2 thin films deposited by reactive sputtering

Eiji Kusano

doi:10.1116/1.5100307

Homologous substrate-temperature dependence of structure and properties of TiO2, ZrO2, and HfO2 thin films deposited by reactive sputtering

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.5100307 ◽

2019 ◽

Vol 37 (5) ◽

pp. 051508 ◽

Cited By ~ 2

Author(s):

Eiji Kusano

Keyword(s):

Thin Films ◽

Substrate Temperature ◽

Temperature Dependence ◽

Reactive Sputtering ◽

Structure And Properties ◽

Homologous Substrate

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Substrate temperature dependence of the texture quality in YBCO thin films fabricated by on-axis pulsed-laser ablation

Superconductor Science and Technology ◽

10.1088/0953-2048/10/1/006 ◽

1997 ◽

Vol 10 (1) ◽

pp. 41-46 ◽

Cited By ~ 40

Author(s):

B L Low ◽

S Y Xu ◽

C K Ong ◽

X B Wang ◽

Z X Shen

Keyword(s):

Thin Films ◽

Laser Ablation ◽

Substrate Temperature ◽

Temperature Dependence ◽

Pulsed Laser ◽

Pulsed Laser Ablation ◽

Ybco Thin Films

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Substrate Temperature Dependence of Microcrystalline Silicon Thin Films by Combinatorial CVD Deposition

Journal of the Korean institute of surface engineering ◽

10.5695/jkise.2015.48.3.126 ◽

2015 ◽

Vol 48 (3) ◽

pp. 126-130

Author(s):

Yeonwon Kim

Keyword(s):

Thin Films ◽

Substrate Temperature ◽

Temperature Dependence ◽

Microcrystalline Silicon ◽

Silicon Thin Films

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Substrate temperature dependence of structural, morphological and optical properties of Sn4Sb6S13 thin films deposited by vacuum thermal evaporation

Materials Research Bulletin ◽

10.1016/j.materresbull.2016.02.043 ◽

2016 ◽

Vol 79 ◽

pp. 52-62 ◽

Cited By ~ 6

Author(s):

A. Harizi ◽

M. Ben Rabeh ◽

F. Laatar ◽

F. Chaffar Akkari ◽

M. Kanzari

Keyword(s):

Thin Films ◽

Optical Properties ◽

Substrate Temperature ◽

Temperature Dependence ◽

Thermal Evaporation ◽

Vacuum Thermal Evaporation

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Effects of Substrate Temperature on Electrochromic Properties of Cobalt Oxide and Oxyhydroxide Thin Films Prepared by Reactive Sputtering Using O$_{2}$ and H$_{2}$O Gases

Japanese Journal of Applied Physics ◽

10.1143/jjap.51.045501 ◽

2012 ◽

Vol 51 ◽

pp. 045501 ◽

Cited By ~ 2

Author(s):

KyoungMoo Lee ◽

Yoshio Abe ◽

Midori Kawamura ◽

Kyung Ho Kim

Keyword(s):

Thin Films ◽

Substrate Temperature ◽

Cobalt Oxide ◽

Reactive Sputtering ◽

Electrochromic Properties

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Substrate temperature dependence of nanoparticle ZnO thin films deposited on flexible substrates by RF magnetron sputtering

2012 International Conference on Enabling Science and Nanotechnology ◽

10.1109/escinano.2012.6149676 ◽

2012 ◽

Cited By ~ 2

Author(s):

Nur Saradah Muhamad Sauki ◽

Sukreen Hana Herman ◽

Mohamad Rusop Mahmood

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Substrate Temperature ◽

Temperature Dependence ◽

Rf Magnetron Sputtering ◽

Zno Thin Films ◽

Flexible Substrates

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Samarium oxide thin films deposited by reactive sputtering: Effects of sputtering power and substrate temperature on microstructure, morphology and electrical properties

Materials Science in Semiconductor Processing ◽

10.1016/j.mssp.2015.01.035 ◽

2015 ◽

Vol 33 ◽

pp. 42-48 ◽

Cited By ~ 25

Author(s):

S. Kaya ◽

E. Yilmaz ◽

H. Karacali ◽

A.O. Cetinkaya ◽

A. Aktag

Keyword(s):

Thin Films ◽

Electrical Properties ◽

Substrate Temperature ◽

Reactive Sputtering ◽

Samarium Oxide ◽

Oxide Thin Films ◽

Sputtering Power ◽

Microstructure Morphology

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Substrate temperature dependence of properties of ZnO thin films deposited by LP-MOCVD

Applied Physics A ◽

10.1007/s00339-002-2051-y ◽

2004 ◽

Vol 78 (5) ◽

pp. 761-764 ◽

Cited By ~ 12

Author(s):

J.D. Ye ◽

S.L. Gu ◽

S.M. Zhu ◽

F. Qin ◽

L.Q. Hu ◽

...

Keyword(s):

Thin Films ◽

Substrate Temperature ◽

Temperature Dependence ◽

Zno Thin Films

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Substrate temperature dependence on the optical properties of Cu and Ag thin films

The European Physical Journal Applied Physics ◽

10.1051/epjap:2005053 ◽

2005 ◽

Vol 31 (2) ◽

pp. 101-112 ◽

Cited By ~ 19

Author(s):

H. Savaloni ◽

Ahmad Reza Khakpour

Keyword(s):

Thin Films ◽

Optical Properties ◽

Substrate Temperature ◽

Temperature Dependence

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Effects of Substrate Temperature on Electrochromic Properties of Cobalt Oxide and Oxyhydroxide Thin Films Prepared by Reactive Sputtering Using O2and H2O Gases

Japanese Journal of Applied Physics ◽

10.7567/jjap.51.045501 ◽

2012 ◽

Vol 51 (4R) ◽

pp. 045501

Author(s):

KyoungMoo Lee ◽

Yoshio Abe ◽

Midori Kawamura ◽

Kyung Ho Kim

Keyword(s):

Thin Films ◽

Substrate Temperature ◽

Cobalt Oxide ◽

Reactive Sputtering ◽

Electrochromic Properties

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Substrate temperature dependence of growth mode, microstructure and optical properties of highly oriented zinc oxide films deposited by reactive sputtering

Thin Solid Films ◽

10.1016/j.tsf.2008.07.040 ◽

2008 ◽

Vol 517 (2) ◽

pp. 661-669 ◽

Cited By ~ 20

Author(s):

Sukhvinder Singh ◽

Tapas Ganguli ◽

Ravi Kumar ◽

R.S. Srinivasa ◽

S.S. Major

Keyword(s):

Zinc Oxide ◽

Optical Properties ◽

Substrate Temperature ◽

Temperature Dependence ◽

Oxide Films ◽

Reactive Sputtering ◽

Growth Mode ◽

Zinc Oxide Films

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