Reactivity studies and structural properties of Al on compound semiconductor surfaces

2018 ◽  
Vol 36 (6) ◽  
pp. 062903 ◽  
Author(s):  
Wendy L. Sarney ◽  
Stefan P. Svensson ◽  
Kaushini S. Wickramasinghe ◽  
Joseph Yuan ◽  
Javad Shabani
Keyword(s):  
Structural Properties ◽  
Compound Semiconductor ◽  
Semiconductor Surfaces

Hydrogen Plasma Etching of III-V Compound Semiconductor Surfaces

1982 ◽  
Author(s):  
R. P. H. Chang ◽  
C. W. Tu ◽  
C. C. Chang ◽  
S. Darack ◽  
A. R. Schlier
Keyword(s):  
Plasma Etching ◽  
Hydrogen Plasma ◽  
Compound Semiconductor ◽  
Semiconductor Surfaces
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