Enhanced silicon nitride etching in the presence of F atoms: Quantum chemistry simulation
2018 ◽
Vol 36
(6)
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pp. 061301
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2012 ◽
Vol 14
(11)
◽
pp. 115023
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2020 ◽
Vol 46
(7)
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pp. 521-529
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2012 ◽
Vol 14
(26)
◽
pp. 9411
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1977 ◽
Vol 35
◽
pp. 114-115