Generalized method for probing ideal initial polarization states in multibeam Lloyd's mirror interference lithography of 2D scale gratings
2018 ◽
Vol 36
(2)
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pp. 021601
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2018 ◽
Vol 461
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pp. 171-174
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1980 ◽
Vol 61
(1)
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pp. 115-129
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Keyword(s):
2017 ◽
Vol 170
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pp. 49-53
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Keyword(s):