scholarly journals Atomic layer deposition frequency-multiplied Fresnel zone plates for hard x-rays focusing

2018 ◽  
Vol 36 (1) ◽  
pp. 01A124 ◽  
Author(s):  
Nicolaie Moldovan ◽  
Ralu Divan ◽  
Hongjun Zeng ◽  
Leonidas E. Ocola ◽  
Vincent De Andrade ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Fresnel Zone ◽  
Atomic Layer ◽  
X Rays ◽  
Fresnel Zone Plates ◽  
Zone Plates ◽  
Layer Deposition

Recent advances in use of atomic layer deposition and focused ion beams for fabrication of Fresnel zone plates for hard x-rays

2013 ◽  
Author(s):  
Kahraman Keskinbora ◽  
Anna-Lena Robisch ◽  
Marcel Mayer ◽  
Corinne Grévent ◽  
Adriana V. Szeghalmi ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Fresnel Zone ◽  
Atomic Layer ◽  
Ion Beams ◽  
Focused Ion Beams ◽  
X Rays ◽  
Fresnel Zone Plates ◽  
Zone Plates ◽  
Recent Advances ◽  
Layer Deposition

scholarly journals Efficient focusing of 8 keV X-rays with multilayer Fresnel zone plates fabricated by atomic layer deposition and focused ion beam milling. Erratum

2014 ◽  
Vol 21 (3) ◽  
pp. 640-640 ◽  
Author(s):  
Marcel Mayer ◽  
Kahraman Keskinbora ◽  
Corinne Grévent ◽  
Adriana Szeghalmi ◽  
Mato Knez ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Focused Ion Beam ◽  
Fresnel Zone ◽  
Ion Beam ◽  
Atomic Layer ◽  
X Rays ◽  
Fresnel Zone Plates ◽  
Zone Plates ◽  
Layer Deposition ◽  
Focused Ion Beam Milling

Corrections to the article by Mayeret al.[J. Synchrotron Rad.(2013),20, 433–440] are given.

Investigation on the Preparation of High Precision Multilayer X-ray Fresnel Zone Plates Based on Atomic Layer Deposition Technology

2021 ◽  
Vol 50 (1) ◽  
pp. 156-164
Author(s):  
吴鹿杰 Lujie WU ◽  
文庆涛 Qingtao WEN ◽  
高雅增 Yazeng GAO ◽  
卢维尔 Weier LU ◽  
夏洋 Yang XIA ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
High Precision ◽  
Fresnel Zone ◽  
Atomic Layer ◽  
Fresnel Zone Plates ◽  
X Ray ◽  
Zone Plates ◽  
Layer Deposition ◽  
Deposition Technology

Investigation on the Preparation of High Precision Multilayer X-ray Fresnel Zone Plates Based on Atomic Layer Deposition Technology

2021 ◽  
Vol 50 (1) ◽  
pp. 156-164
Author(s):  
吴鹿杰 Lujie WU ◽  
文庆涛 Qingtao WEN ◽  
高雅增 Yazeng GAO ◽  
卢维尔 Weier LU ◽  
夏洋 Yang XIA ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
High Precision ◽  
Fresnel Zone ◽  
Atomic Layer ◽  
Fresnel Zone Plates ◽  
X Ray ◽  
Zone Plates ◽  
Layer Deposition ◽  
Deposition Technology

scholarly journals Efficient focusing of 8 keV X-rays with multilayer Fresnel zone plates fabricated by atomic layer deposition and focused ion beam milling

2013 ◽  
Vol 20 (3) ◽  
pp. 433-440 ◽  
Author(s):  
Marcel Mayer ◽  
Kahraman Keskinbora ◽  
Corinne Grévent ◽  
Adriana Szeghalmi ◽  
Mato Knez ◽  
...  
Keyword(s):  
Focused Ion Beam ◽  
Fresnel Zone ◽  
Ion Beam ◽  
Atomic Layer ◽  
X Rays ◽  
Zone Plates ◽  
Aspect Ratios ◽  
Layer Deposition ◽  
Very High ◽  
Outermost Zone

Fresnel zone plates (FZPs) recently showed significant improvement by focusing soft X-rays down to ∼10 nm. In contrast to soft X-rays, generally a very high aspect ratio FZP is needed for efficient focusing of hard X-rays. Therefore, FZPs had limited success in the hard X-ray range owing to difficulties of manufacturing high-aspect-ratio zone plates using conventional techniques. Here, employing a method of fabrication based on atomic layer deposition (ALD) and focused ion beam (FIB) milling, FZPs with very high aspect ratios were prepared. Such multilayer FZPs with outermost zone widths of 10 and 35 nm and aspect ratios of up to 243 were tested for their focusing properties at 8 keV and shown to focus hard X-rays efficiently. This success was enabled by the outstanding layer quality thanks to ALD.Viathe use of FIB for slicing the multilayer structures, desired aspect ratios could be obtained by precisely controlling the thickness. Experimental diffraction efficiencies of multilayer FZPs fabricatedviathis combination reached up to 15.58% at 8 keV. In addition, scanning transmission X-ray microscopy experiments at 1.5 keV were carried out using one of the multilayer FZPs and resolved a 60 nm feature size. Finally, the prospective of different material combinations with various outermost zone widths at 8 and 17 keV is discussed in the light of the coupled wave theory and the thin-grating approximation. Al2O3/Ir is outlined as a promising future material candidate for extremely high resolution with a theoretical efficiency of more than 20% for as small an outermost zone width as 10 nm at 17 keV.

scholarly journals High-Efficiency Gold Fresnel Zone Plates for Multi-keV X-rays

2011 ◽  
Author(s):  
S. Gorelick ◽  
J. Vila-Comamala ◽  
V. A. Guzenko ◽  
R. Barrett ◽  
M. Salomé ◽  
...  
Keyword(s):  
High Efficiency ◽  
Fresnel Zone ◽  
X Rays ◽  
Fresnel Zone Plates ◽  
Zone Plates

High resolution fresnel zone plates for soft x-rays

1994 ◽  
Vol 23 (1-4) ◽  
pp. 101-104 ◽  
Author(s):  
M. Baciocchi ◽  
R. Maggiora ◽  
M. Gentili
Keyword(s):  
High Resolution ◽  
Fresnel Zone ◽  
X Rays ◽  
Fresnel Zone Plates ◽  
Zone Plates

scholarly journals High-efficiency zone-plate optics for multi-keV X-ray focusing

2014 ◽  
Vol 21 (3) ◽  
pp. 497-501 ◽  
Author(s):  
Istvan Mohacsi ◽  
Petri Karvinen ◽  
Ismo Vartiainen ◽  
Vitaliy A. Guzenko ◽  
Andrea Somogyi ◽  
...  
Keyword(s):  
Optical Transmission ◽  
High Efficiency ◽  
Fresnel Zone ◽  
Transmission Function ◽  
Zone Plate ◽  
X Rays ◽  
Fresnel Zone Plates ◽  
X Ray ◽  
Zone Plates ◽  
The Ideal

High-efficiency nanofocusing of hard X-rays using stacked multilevel Fresnel zone plates with a smallest zone width of 200 nm is demonstrated. The approach is to approximate the ideal parabolic lens profile with two-, three-, four- and six-level zone plates. By stacking binary and three-level zone plates with an additional binary zone plate, the number of levels in the optical transmission function was doubled, resulting in four- and six-level profiles, respectively. Efficiencies up to 53.7% focusing were experimentally obtained with 6.5 keV photons using a compact alignment apparatus based on piezoelectric actuators. The measurements have also been compared with numerical simulations to study the misalignment of the two zone plates.

Focusing high energy X-rays with stacked Fresnel zone plates

2007 ◽  
Vol 204 (8) ◽  
pp. 2817-2823 ◽  
Author(s):  
I. Snigireva ◽  
A. Snigirev ◽  
V. Kohn ◽  
V. Yunkin ◽  
M. Grigoriev ◽  
...  
Keyword(s):  
Fresnel Zone ◽  
High Energy ◽  
X Rays ◽  
Fresnel Zone Plates ◽  
Zone Plates

scholarly journals X-ray picture of the Sun taken with Fresnel zone plates

1968 ◽  
Vol 35 ◽  
pp. 439-443
Author(s):  
G. Elwert
Keyword(s):  
Fresnel Zone ◽  
Focal Length ◽  
Brightness Distribution ◽  
Resolving Power ◽  
X Rays ◽  
Applied Physics ◽  
Fresnel Zone Plates ◽  
Zone Plates ◽  
The One ◽  
The Individual

It is well known that Fresnel zone plates act as a lens with a focal length inversely proportional to the wavelength. At Professor Moellenstedt's Institute of Applied Physics in Tübingen, a technique has been developed to manufacture micro-zone plates electronoptically from Buckbee-Mears zone plates. These micro-zone plates have a diameter of 0·5 mm approximately, 38 zones and a focal length of 30 cm for X-rays of nearly 50 Å. Their resolving power is of the order of a few seconds of arc (Einighammer et al., 1966). One finds, however, experimentally as well as theoretically that the sharply defined image is surrounded by a halo having a diameter of a few minutes of arc for the above-mentioned zone plates. Whereas for a point source the intensity of a halo is poor and therefore unimportant, for extended sources it becomes large as a result of the superposition of the contributions from the individual points of the source. This has been demonstrated by the photometer curves of the images of circular sources by Einighammer (1966) (Figure 1). The halo is not noticeable in case of very narrow sources (curves a and b). With increasing diameter of the source the intensity of the halo rapidly increases (curves c and d). For the same source the brightness distribution of the halo agrees practically with the one obtained by a pinhole camera, provided the diameter of the hole and that of the zone plate are equal; these brightness distributions are represented by the dashed lines c′ d′ in Figure 1.

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