Effects of cesium ion implantation on the mechanical and electrical properties of porous SiCOH low-k dielectrics

2017 ◽  
Vol 35 (6) ◽  
pp. 061506 ◽  
Author(s):  
Weiyi Li ◽  
Dongfei Pei ◽  
Daniel Benjamin ◽  
Jen-Yung Chang ◽  
Sean W. King ◽  
...  
Keyword(s):  
Electrical Properties ◽  
Ion Implantation ◽  
Mechanical And Electrical Properties ◽  
Cesium Ion ◽  
Low K

Effects of cesium ion-implantation on mechanical and electrical properties of organosilicate low-k films

2016 ◽  
Vol 108 (20) ◽  
pp. 202901 ◽  
Author(s):  
W. Li ◽  
D. Pei ◽  
X. Guo ◽  
M. K. Cheng ◽  
S. Lee ◽  
...  
Keyword(s):  
Electrical Properties ◽  
Ion Implantation ◽  
Mechanical And Electrical Properties ◽  
Cesium Ion ◽  
Low K

Electrical/Mechanical Properties of Porous Low-k Thin Films by Using Various Supramolecule Based Porogen

2007 ◽  
Vol 124-126 ◽  
pp. 185-188
Author(s):  
Jin Heong Yim ◽  
Young Kwon Park ◽  
Jong Ki Jeon
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
Electrical Properties ◽  
Pore Diameter ◽  
Dielectric Materials ◽  
Porous Films ◽  
Low Dielectric ◽  
Mechanical And Electrical Properties ◽  
Low K ◽  
Deposited Films

The porous SSQ (silsesquioxane) films were prepared by using alkoxy silyl substituted cyclodextrin (sCD) and methyl substituted cyclodextrin (tCD) based porogen. The mechanical and electrical properties of these deposited films were investigated for the applications as low dielectric materials. The mechanical properties of porous film by using sCD are worse than those by using tCD due to its high pore interconnection length. sCD templated porous films show almost constant pore diameter as a function of porogen concentration due to strong linear polymerization of the sCD molecules through polycondensation.

Study of mechanical and electrical properties of AlMgSi alloys

2010 ◽  
Vol 35 (1) ◽  
pp. 59-69 ◽  
Author(s):  
Fares Serradj ◽  
Rebal Guemini ◽  
Hichem Farh ◽  
Karim Djemmal
Keyword(s):  
Electrical Properties ◽  
Mechanical And Electrical Properties

scholarly journals The Physical-Mechanical and Electrical Properties of Cast Aluminum-Based Alloys Reinforced with Diamond Nanoparticles

2015 ◽  
Vol 57 (11) ◽  
pp. 1485-1490 ◽  
Author(s):  
S. A. Vorozhtsov ◽  
А. P. Khrustalyov ◽  
D. G. Eskin ◽  
S. N. Кulkov ◽  
N. Alba-Baena
Keyword(s):  
Electrical Properties ◽  
Cast Aluminum ◽  
Diamond Nanoparticles ◽  
Mechanical And Electrical Properties
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