Correlation of target properties and plasma parameters in DC magnetron sputtering with Langmuir probe measurements

2017 ◽  
Vol 35 (6) ◽  
pp. 061308 ◽  
Author(s):  
Stefan Raggl ◽  
Johannes Postler ◽  
Jörg Winkler ◽  
Georg Strauss ◽  
Christian Feist ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Langmuir Probe ◽  
Dc Magnetron Sputtering ◽  
Plasma Parameters ◽  
Langmuir Probe Measurements ◽  
Probe Measurements

Langmuir Probe Measurements in a Grid-Assisted Magnetron Sputtering System

2017 ◽  
Vol 48 (1) ◽  
pp. 61-66 ◽  
Author(s):  
Julio César Sagás ◽  
Rodrigo Sávio Pessoa ◽  
Homero Santiago Maciel
Keyword(s):  
Magnetron Sputtering ◽  
Langmuir Probe ◽  
Langmuir Probe Measurements ◽  
Probe Measurements ◽  
Sputtering System

Study of an RF planar magnetron sputtering discharge with Langmuir probe measurements

1998 ◽  
Vol 98 (1-3) ◽  
pp. 1426-1432 ◽  
Author(s):  
P.-Y. Jouan ◽  
A.-C. Vanderbecq ◽  
J.-P. Dauchot ◽  
M. Wautelet ◽  
M. Hecq
Keyword(s):  
Magnetron Sputtering ◽  
Langmuir Probe ◽  
Planar Magnetron ◽  
Langmuir Probe Measurements ◽  
Probe Measurements

Langmuir probe measurements of plasma parameters in the late stages of a laser ablated plume

1997 ◽  
Vol 81 (5) ◽  
pp. 2131-2134 ◽  
Author(s):  
J. M. Hendron ◽  
C. M. O. Mahony ◽  
T. Morrow ◽  
W. G. Graham
Keyword(s):  
Langmuir Probe ◽  
Plasma Parameters ◽  
Langmuir Probe Measurements ◽  
Late Stages ◽  
Probe Measurements

scholarly journals Single Langmuir Probe Measurements in an Unbalanced Magnetron Sputtering System

2012 ◽  
Vol 32 ◽  
pp. 962-968 ◽  
Author(s):  
K. Honglertkongsakul ◽  
S. Chaiyakun ◽  
N. Witit-anun ◽  
W. Kongsri ◽  
P. Limsuwan
Keyword(s):  
Magnetron Sputtering ◽  
Langmuir Probe ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron ◽  
Langmuir Probe Measurements ◽  
Probe Measurements ◽  
Sputtering System
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