Effect of proton irradiation dose on InAlN/GaN metal-oxide semiconductor high electron mobility transistors with Al2O3 gate oxide

Shihyun Ahn; Byung-Jae Kim; Yi-Hsuan Lin; Fan Ren; Stephen J. Pearton; Gwangseok Yang; Jihyun Kim; Ivan I. Kravchenko

doi:10.1116/1.4959786

Effect of proton irradiation dose on InAlN/GaN metal-oxide semiconductor high electron mobility transistors with Al2O3 gate oxide

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ◽

10.1116/1.4959786 ◽

2016 ◽

Vol 34 (5) ◽

pp. 051202 ◽

Cited By ~ 9

Author(s):

Shihyun Ahn ◽

Byung-Jae Kim ◽

Yi-Hsuan Lin ◽

Fan Ren ◽

Stephen J. Pearton ◽

...

Keyword(s):

Electron Mobility ◽

Irradiation Dose ◽

Proton Irradiation ◽

High Electron Mobility Transistors ◽

Gate Oxide ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

High Electron ◽

High Electron Mobility ◽

Electron Mobility Transistors

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Study on Effect of Proton Irradiation Energy in AlGaN/GaN Metal-Oxide Semiconductor High Electron Mobility Transistors

ECS Transactions ◽

10.1149/06914.0129ecst ◽

2015 ◽

Vol 69 (14) ◽

pp. 129-135 ◽

Cited By ~ 2

Author(s):

S. Ahn ◽

C. Dong ◽

W. Zhu ◽

B.-J. Kim ◽

Y.-H. Hwang ◽

...

Keyword(s):

Metal Oxide ◽

Electron Mobility ◽

Proton Irradiation ◽

High Electron Mobility Transistors ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

High Electron ◽

High Electron Mobility ◽

Electron Mobility Transistors ◽

Irradiation Energy

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Study on Effect of Proton Irradiation Energy in AlGaN/GaN Metal-Oxide Semiconductor High Electron Mobility Transistors

ECS Meeting Abstracts ◽

10.1149/ma2015-02/33/1223 ◽

2015 ◽

Keyword(s):

Metal Oxide ◽

Electron Mobility ◽

Proton Irradiation ◽

High Electron Mobility Transistors ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

High Electron ◽

High Electron Mobility ◽

Electron Mobility Transistors ◽

Irradiation Energy

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Study of gate oxide traps in HfO2/AlGaN/GaN metal-oxide-semiconductor high-electron-mobility transistors by use of ac transconductance method

Applied Physics Letters ◽

10.1063/1.4795717 ◽

2013 ◽

Vol 102 (10) ◽

pp. 103504 ◽

Cited By ~ 51

Author(s):

X. Sun ◽

O. I. Saadat ◽

K. S. Chang-Liao ◽

T. Palacios ◽

S. Cui ◽

...

Keyword(s):

Metal Oxide ◽

Electron Mobility ◽

High Electron Mobility Transistors ◽

Gate Oxide ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

High Electron ◽

High Electron Mobility ◽

Electron Mobility Transistors ◽

Oxide Traps

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Effect of proton irradiation energy on AlGaN/GaN metal-oxide semiconductor high electron mobility transistors

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ◽

10.1116/1.4928730 ◽

2015 ◽

Vol 33 (5) ◽

pp. 051208 ◽

Cited By ~ 6

Author(s):

Shihyun Ahn ◽

Chen Dong ◽

Weidi Zhu ◽

Byung-Jae Kim ◽

Ya-Hsi Hwang ◽

...

Keyword(s):

Metal Oxide ◽

Electron Mobility ◽

Proton Irradiation ◽

High Electron Mobility Transistors ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

High Electron ◽

High Electron Mobility ◽

Electron Mobility Transistors ◽

Irradiation Energy

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AlGaN/GaN metal–oxide–semiconductor high electron mobility transistors using Sc2O3 as the gate oxide and surface passivation

Applied Physics Letters ◽

10.1063/1.1567051 ◽

2003 ◽

Vol 82 (15) ◽

pp. 2530-2532 ◽

Cited By ~ 103

Author(s):

R. Mehandru ◽

B. Luo ◽

J. Kim ◽

F. Ren ◽

B. P. Gila ◽

...

Keyword(s):

Metal Oxide ◽

Electron Mobility ◽

Surface Passivation ◽

High Electron Mobility Transistors ◽

Gate Oxide ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

High Electron ◽

High Electron Mobility ◽

Electron Mobility Transistors

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Evolution of field dependent carrier trapping during off-state degradation for GaN based metal oxide semiconductor high electron mobility transistors

Journal of Applied Physics ◽

10.1063/1.5044590 ◽

2018 ◽

Vol 124 (16) ◽

pp. 165704 ◽

Cited By ~ 2

Author(s):

Jaya Jha ◽

Bhanu B. Upadhyay ◽

Kuldeep Takhar ◽

Navneet Bhardwaj ◽

Swaroop Ganguly ◽

...

Keyword(s):

Metal Oxide ◽

Electron Mobility ◽

High Electron Mobility Transistors ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

High Electron ◽

High Electron Mobility ◽

Carrier Trapping ◽

Electron Mobility Transistors ◽

Field Dependent

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Metal Oxide Semiconductor High Electron Mobility Transistors

Handbook for III-V High Electron Mobility Transistor Technologies ◽

10.1201/9780429460043-15 ◽

2019 ◽

pp. 391-402 ◽

Cited By ~ 1

Author(s):

D. K. Panda ◽

G. Amarnath ◽

T. R. Lenka

Keyword(s):

Metal Oxide ◽

Electron Mobility ◽

High Electron Mobility Transistors ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

High Electron ◽

High Electron Mobility ◽

Electron Mobility Transistors

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AlGaN/GaN metal-oxide-semiconductor high-electron-mobility transistors with TiO2 gate dielectrics

2016 Compound Semiconductor Week (CSW) [Includes 28th International Conference on Indium Phosphide & Related Materials (IPRM) & 43rd International Symposium on Compound Semiconductors (ISCS) ◽

10.1109/iciprm.2016.7528615 ◽

2016 ◽

Author(s):

Yu-Shyan Lin ◽

Chi-Che Lu

Keyword(s):

Metal Oxide ◽

Electron Mobility ◽

Gate Dielectrics ◽

High Electron Mobility Transistors ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

High Electron ◽

High Electron Mobility ◽

Electron Mobility Transistors

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Surface Treatment, Fabrication, and Performances of GaN-Based Metal–Oxide–Semiconductor High-Electron Mobility Transistors

Nano-Semiconductors ◽

10.1201/9781315217468-22 ◽

2018 ◽

pp. 429-474

Keyword(s):

Metal Oxide ◽

Surface Treatment ◽

Electron Mobility ◽

High Electron Mobility Transistors ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

High Electron ◽

High Electron Mobility ◽

Electron Mobility Transistors

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Fin-Gated Nanochannel Array Gate-Recessed AlGaN/GaN Metal-Oxide-Semiconductor High-Electron-Mobility Transistors

IEEE Transactions on Electron Devices ◽

10.1109/ted.2020.2981138 ◽

2020 ◽

Vol 67 (5) ◽

pp. 1939-1945 ◽

Cited By ~ 1

Author(s):

Ching-Ting Lee ◽

Jia-Chen Guo

Keyword(s):

Metal Oxide ◽

Electron Mobility ◽

High Electron Mobility Transistors ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

High Electron ◽

High Electron Mobility ◽

Electron Mobility Transistors ◽

Nanochannel Array

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