Analysis and optimization of sputter deposited AlN-layers for flexural plate wave devices

2016 ◽  
Vol 34 (5) ◽  
pp. 052001 ◽  
Author(s):  
Markus Reusch ◽  
Katarzyna Holc ◽  
Wilfried Pletschen ◽  
Lutz Kirste ◽  
Agnė Žukauskaitė ◽  
...  
Keyword(s):  
Plate Wave ◽  
Sputter Deposited ◽  
Flexural Plate Wave

Flexural plate wave devices for chemical analysis

1991 ◽  
Vol 63 (15) ◽  
pp. 1552-1561 ◽  
Author(s):  
Jay W. Grate ◽  
Stuart W. Wenzel ◽  
Richard M. White
Keyword(s):  
Chemical Analysis ◽  
Plate Wave ◽  
Flexural Plate Wave

Pressure sensing with a flexural plate wave resonator

1999 ◽  
Vol 85 (3) ◽  
pp. 1998-2000 ◽  
Author(s):  
M. A. Butler ◽  
M. K. Hill ◽  
J. J. Spates ◽  
S. J. Martin
Keyword(s):  
Pressure Sensing ◽  
Plate Wave ◽  
Wave Resonator ◽  
Flexural Plate Wave

Design and Fabrication of a MEMS Flexural Plate Wave Device Based on LTO/ZnO/LTO/Si3N4 Multilayered Composite Membrane

2012 ◽  
Vol 503 ◽  
pp. 29-34
Author(s):  
Ming Xin Xue ◽  
Meng Wei Liu ◽  
Xin Li ◽  
Jun Hong Li
Keyword(s):  
Composite Membrane ◽  
Rf Magnetron Sputtering ◽  
Fabrication Process ◽  
Center Frequency ◽  
Zno Films ◽  
Thin Membrane ◽  
Plate Wave ◽  
Multilayered Composite ◽  
Flexural Plate Wave ◽  
Wave Device

The MEMS A0mode Lamb wave (flexural plate wave) ultrasonic devices have been shown to be extremely useful for sensor and actuator applications. The design and fabrication process of a MEMS flexural plate wave device based on the LTO/ZnO/LTO/Si3N4multilayered composite membrane are presented. The flexural plate wave was respectively launched and received by both Al interdigital transducers. In order to reduce the stress of the thin membrane induced mainly by the in-plane compressive stress of ZnO film, two fabrication process of DC and RF magnetron sputtering were used to deposit the ZnO films, respectively. The FPW device based on LTO(0.2μm)/ZnO(1μm)/ LTO(2μm)/Si3N4(0.5μm) thin membrane was fabricated. The center frequency of the MEMS flexural plate wave device is measured at 3.69MHz, which agrees with the theoretical predictions.

scholarly journals Magnetically-excited flexural plate wave resonator

2002 ◽  
Author(s):  
S.J. Martin ◽  
M.A. Butler ◽  
J.J. Spates ◽  
W.K. Schubert ◽  
M.A. Mitchell
Keyword(s):  
Plate Wave ◽  
Wave Resonator ◽  
Flexural Plate Wave

Electroosmotic Augmentation in Flexural Plate Wave Micropumps

2013 ◽  
Vol 22 (2) ◽  
pp. 372-385 ◽  
Author(s):  
Ersin Sayar ◽  
Bakhtier Farouk
Keyword(s):  
Plate Wave ◽  
Flexural Plate Wave
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