TiN diffusion barrier failure by the formation of Cu3Si investigated by electron microscopy and atom probe tomography
2016 ◽
Vol 34
(2)
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pp. 022202
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Keyword(s):
2019 ◽
Vol 55
(6)
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pp. 1382-1403
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Keyword(s):
2020 ◽
Vol 891
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pp. 012008
2013 ◽
Vol 19
(3)
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pp. 676-687
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