Low-temperature SiON films deposited by plasma-enhanced atomic layer deposition method using activated silicon precursor

2016 ◽  
Vol 34 (1) ◽  
pp. 01A136 ◽  
Author(s):  
Sungin Suh ◽  
Seung Wook Ryu ◽  
Seongjae Cho ◽  
Jun-Rae Kim ◽  
Seongkyung Kim ◽  
...  
Keyword(s):  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Deposition Method ◽  
Layer Deposition ◽  
Atomic Layer Deposition Method

scholarly journals Ytterbium-doped fibers fabricated with atomic layer deposition method

2012 ◽  
Vol 20 (22) ◽  
pp. 25085 ◽  
Author(s):  
Joan J. Montiel i Ponsoda ◽  
Lars Norin ◽  
Changgeng Ye ◽  
Markus Bosund ◽  
Mikko J. Söderlund ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Deposition Method ◽  
Layer Deposition ◽  
Atomic Layer Deposition Method ◽  
Doped Fibers

scholarly journals Effect of ZnO and SnO2 Nanolayers at Grain Boundaries on Thermoelectric Properties of Polycrystalline Skutterudites

Nanomaterials ◽  
2020 ◽  
Vol 10 (11) ◽  
pp. 2270
Author(s):  
Sang-il Kim ◽  
Jiwoo An ◽  
Woo-Jae Lee ◽  
Se Kwon ◽  
Woo Nam ◽  
...  
Keyword(s):  
Thermal Conductivity ◽  
Atomic Layer Deposition ◽  
Grain Boundaries ◽  
Thermoelectric Properties ◽  
Phonon Scattering ◽  
Atomic Layer ◽  
Deposition Method ◽  
Plasma Sintering ◽  
Layer Deposition ◽  
Atomic Layer Deposition Method

Nanostructuring is considered one of the key approaches to achieve highly efficient thermoelectric alloys by reducing thermal conductivity. In this study, we investigated the effect of oxide (ZnO and SnO2) nanolayers at the grain boundaries of polycrystalline In0.2Yb0.1Co4Sb12 skutterudites on their electrical and thermal transport properties. Skutterudite powders with oxide nanolayers were prepared by atomic layer deposition method, and the number of deposition cycles was varied to control the coating thickness. The coated powders were consolidated by spark plasma sintering. With increasing number of deposition cycle, the electrical conductivity gradually decreased, while the Seebeck coefficient changed insignificantly; this indicates that the carrier mobility decreased due to the oxide nanolayers. In contrast, the lattice thermal conductivity increased with an increase in the number of deposition cycles, demonstrating the reduction in phonon scattering by grain boundaries owing to the oxide nanolayers. Thus, we could easily control the thermoelectric properties of skutterudite materials through adjusting the oxide nanolayer by atomic layer deposition method.

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