Fabrication of nanodamascene metallic single electron transistors with atomic layer deposition of tunnel barrier

Golnaz Karbasian; Alexei O. Orlov; Gregory L. Snider

doi:10.1116/1.4932156

Fabrication of nanodamascene metallic single electron transistors with atomic layer deposition of tunnel barrier

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ◽

10.1116/1.4932156 ◽

2015 ◽

Vol 33 (6) ◽

pp. 06FG02 ◽

Cited By ~ 5

Author(s):

Golnaz Karbasian ◽

Alexei O. Orlov ◽

Gregory L. Snider

Keyword(s):

Atomic Layer Deposition ◽

Atomic Layer ◽

Single Electron ◽

Tunnel Barrier ◽

Single Electron Transistors ◽

Layer Deposition ◽

Electron Transistors

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Single-electron transistors featuring silicon nitride tunnel barriers prepared by atomic layer deposition

2016 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS) ◽

10.1109/ulis.2016.7440045 ◽

2016 ◽

Cited By ~ 4

Author(s):

Golnaz Karbasian ◽

Alexei O. Orlov ◽

Alexander S. Mukasyan ◽

Gregory L. Snider

Keyword(s):

Silicon Nitride ◽

Atomic Layer Deposition ◽

Atomic Layer ◽

Single Electron ◽

Single Electron Transistors ◽

Layer Deposition ◽

Tunnel Barriers ◽

Electron Transistors

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Novel method for fabrication of nanoscale single-electron transistors: Electron beam induced deposition of Pt and atomic layer deposition of tunnel barriers

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ◽

10.1116/1.3640752 ◽

2011 ◽

Vol 29 (6) ◽

pp. 06FB01 ◽

Cited By ~ 10

Author(s):

Hubert C. George ◽

Tatyana A. Orlova ◽

Alexei O. Orlov ◽

Gregory L. Snider

Keyword(s):

Electron Beam ◽

Atomic Layer Deposition ◽

Atomic Layer ◽

Single Electron ◽

Single Electron Transistors ◽

Layer Deposition ◽

Tunnel Barriers ◽

Novel Method ◽

Electron Beam Induced Deposition ◽

Electron Transistors

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Platinum single-electron transistors with tunnel barriers made by atomic layer deposition

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ◽

10.1116/1.3511432 ◽

2010 ◽

Vol 28 (6) ◽

pp. C6L6-C6L8 ◽

Cited By ~ 7

Author(s):

Hubert C. George ◽

Alexei O. Orlov ◽

Gregory L. Snider

Keyword(s):

Atomic Layer Deposition ◽

Atomic Layer ◽

Single Electron ◽

Single Electron Transistors ◽

Layer Deposition ◽

Tunnel Barriers ◽

Electron Transistors

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Metal-Insulator-Metal Single Electron Transistors with Tunnel Barriers Prepared by Atomic Layer Deposition

Applied Sciences ◽

10.3390/app7030246 ◽

2017 ◽

Vol 7 (3) ◽

pp. 246 ◽

Cited By ~ 10

Author(s):

Golnaz Karbasian ◽

Michael McConnell ◽

Hubert George ◽

Louisa Schneider ◽

Matthew Filmer ◽

...

Keyword(s):

Atomic Layer Deposition ◽

Atomic Layer ◽

Single Electron ◽

Single Electron Transistors ◽

Metal Insulator ◽

Layer Deposition ◽

Metal Insulator Metal ◽

Tunnel Barriers ◽

Electron Transistors

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Atomic layer deposition of Al2O3 for single electron transistors utilizing Pt oxidation and reduction

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.4937992 ◽

2016 ◽

Vol 34 (1) ◽

pp. 01A139 ◽

Cited By ~ 5

Author(s):

Michael S. McConnell ◽

Louisa C. Schneider ◽

Golnaz Karbasian ◽

Sergei Rouvimov ◽

Alexei O. Orlov ◽

...

Keyword(s):

Atomic Layer Deposition ◽

Atomic Layer ◽

Single Electron ◽

Single Electron Transistors ◽

Layer Deposition ◽

Electron Transistors

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Experimental demonstration of single electron transistors featuring SiO2plasma-enhanced atomic layer deposition in Ni-SiO2-Ni tunnel junctions

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.4935960 ◽

2016 ◽

Vol 34 (1) ◽

pp. 01A122 ◽

Cited By ~ 4

Author(s):

Golnaz Karbasian ◽

Michael S. McConnell ◽

Alexei O. Orlov ◽

Sergei Rouvimov ◽

Gregory L. Snider

Keyword(s):

Atomic Layer Deposition ◽

Tunnel Junctions ◽

Atomic Layer ◽

Single Electron ◽

Experimental Demonstration ◽

Single Electron Transistors ◽

Layer Deposition ◽

Electron Transistors

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Nanoscale Tunnel Junctions and Metallic Single-Electron Transistors via Shadow Evaporation and In Situ Atomic Layer Deposition of Tunnel Barriers

ACS Applied Nano Materials ◽

10.1021/acsanm.0c02937 ◽

2021 ◽

Vol 4 (2) ◽

pp. 1401-1410

Author(s):

Hiroshi Shimada ◽

Takehiro Koike ◽

Keisuke Kikkawa ◽

Hiroki Konno ◽

Naoki Ito ◽

...

Keyword(s):

Atomic Layer Deposition ◽

Tunnel Junctions ◽

Atomic Layer ◽

Single Electron ◽

Single Electron Transistors ◽

Layer Deposition ◽

Tunnel Barriers ◽

Electron Transistors ◽

Shadow Evaporation

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Formation of tunnel barrier using a pseudo-atomic layer deposition method and its application to spin-dependent tunneling junction

Applied Physics A ◽

10.1007/s00339-004-3012-4 ◽

2005 ◽

Vol 81 (3) ◽

pp. 611-615 ◽

Cited By ~ 2

Author(s):

S.-H. Han ◽

W.-C. Jeong ◽

J.-S. Lee ◽

B.D. Kim ◽

S.-K. Joo

Keyword(s):

Atomic Layer Deposition ◽

Atomic Layer ◽

Tunnel Barrier ◽

Deposition Method ◽

Tunneling Junction ◽

Layer Deposition ◽

Atomic Layer Deposition Method

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Electron tunneling properties of Al2O3 tunnel barrier made using atomic layer deposition in multilayer devices

AIP Advances ◽

10.1063/1.5052163 ◽

2019 ◽

Vol 9 (2) ◽

pp. 025018 ◽

Cited By ~ 3

Author(s):

Ryan Goul ◽

Jamie Wilt ◽

Jagaran Acharya ◽

Bo Liu ◽

Dan Ewing ◽

...

Keyword(s):

Atomic Layer Deposition ◽

Electron Tunneling ◽

Atomic Layer ◽

Tunnel Barrier ◽

Layer Deposition

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Application of Atomic Layer Deposition in Dye-Sensitized Photoelectrosynthesis Cells

Trends in Chemistry ◽

10.1016/j.trechm.2020.11.002 ◽

2021 ◽

Vol 3 (1) ◽

pp. 59-71

Author(s):

Degao Wang ◽

Qing Huang ◽

Weiqun Shi ◽

Wei You ◽

Thomas J. Meyer

Keyword(s):

Atomic Layer Deposition ◽

Atomic Layer ◽

Dye Sensitized ◽

Layer Deposition

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