Large-area SiC membrane produced by plasma enhanced chemical vapor deposition at relatively high temperature
2015 ◽
Vol 33
(5)
◽
pp. 05E114
◽
Keyword(s):
Keyword(s):
2006 ◽
Vol 110
(21)
◽
pp. 10296-10302
◽
Keyword(s):
Keyword(s):
2008 ◽
Vol 21
(8)
◽
pp. 085019
◽
Keyword(s):