Thermal MEMS actuator operation in aqueous media/seawater: Performance enhancement through atomic layer deposition post processing of PolyMUMPs devices

2015 ◽  
Vol 33 (1) ◽  
pp. 01A126 ◽  
Author(s):  
Stephan Warnat ◽  
Cameron Forbrigger ◽  
Ted Hubbard ◽  
Adam Bertuch ◽  
Ganesh Sundaram
Keyword(s):  
Atomic Layer Deposition ◽  
Performance Enhancement ◽  
Aqueous Media ◽  
Atomic Layer ◽  
Post Processing ◽  
Layer Deposition

Atomic Layer Deposition of SiO2for the Performance Enhancement of Fin Field Effect Transistors

2013 ◽  
Vol 52 (11R) ◽  
pp. 116503 ◽  
Author(s):  
Kazuhiko Endo ◽  
Yuki Ishikawa ◽  
Takashi Matsukawa ◽  
Yongxun Liu ◽  
Shin-ichi O'uchi ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Field Effect ◽  
Performance Enhancement ◽  
Field Effect Transistors ◽  
Atomic Layer ◽  
Layer Deposition

Passivation via atomic layer deposition Al2O3 for the performance enhancement of quantum dot photovoltaics

2020 ◽  
Vol 209 ◽  
pp. 110479 ◽  
Author(s):  
Jinhuan Li ◽  
Yinglin Wang ◽  
Fangxu Wan ◽  
Meiqi An ◽  
Meiying Li ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Quantum Dot ◽  
Performance Enhancement ◽  
Atomic Layer ◽  
Layer Deposition
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