Three-dimensional numerical investigations of air bubble defects during antireflective pattern fabrication via ultraviolet nanoimprint lithography

2014 ◽  
Vol 32 (6) ◽  
pp. 061602 ◽  
Author(s):  
David Yoo ◽  
Jeong-Min Seok ◽  
Nam Woong Kim
Keyword(s):  
Nanoimprint Lithography ◽  
Three Dimensional ◽  
Air Bubble ◽  
Numerical Investigations

scholarly journals Mastering of NIL Stamps with Undercut T-Shaped Features from Single Layer to Multilayer Stamps

Nanomaterials ◽  
2021 ◽  
Vol 11 (4) ◽  
pp. 956
Author(s):  
Philipp Taus ◽  
Adrian Prinz ◽  
Heinz D. Wanzenboeck ◽  
Patrick Schuller ◽  
Anton Tsenov ◽  
...  
Keyword(s):  
Electron Beam Lithography ◽  
Nanoimprint Lithography ◽  
Silicon Oxide ◽  
Three Dimensional ◽  
Single Layer ◽  
Fabrication Technology ◽  
Large Area ◽  
Structural Colors ◽  
Biomimetic Structures ◽  
Morpho Butterfly

Biomimetic structures such as structural colors demand a fabrication technology of complex three-dimensional nanostructures on large areas. Nanoimprint lithography (NIL) is capable of large area replication of three-dimensional structures, but the master stamp fabrication is often a bottleneck. We have demonstrated different approaches allowing for the generation of sophisticated undercut T-shaped masters for NIL replication. With a layer-stack of phase transition material (PTM) on poly-Si, we have demonstrated the successful fabrication of a single layer undercut T-shaped structure. With a multilayer-stack of silicon oxide on silicon, we have shown the successful fabrication of a multilayer undercut T-shaped structures. For patterning optical lithography, electron beam lithography and nanoimprint lithography have been compared and have yielded structures from 10 µm down to 300 nm. The multilayer undercut T-shaped structures closely resemble the geometry of the surface of a Morpho butterfly, and may be used in future to replicate structural colors on artificial surfaces.

scholarly journals High laser induced damage threshold photoresists for nano-imprint and 3D multi-photon lithography

Nanophotonics ◽  
2021 ◽  
Vol 0 (0) ◽  
Author(s):  
Elmina Kabouraki ◽  
Vasileia Melissinaki ◽  
Amit Yadav ◽  
Andrius Melninkaitis ◽  
Konstantina Tourlouki ◽  
...  
Keyword(s):  
Nanoimprint Lithography ◽  
Three Dimensional ◽  
Damage Threshold ◽  
Laser Pulses ◽  
Intense Laser ◽  
Optical Elements ◽  
Photonic Circuits ◽  
Future Production ◽  
Intense Laser Pulses ◽  
Laser Induced Damage

Abstract Optics manufacturing technology is predicted to play a major role in the future production of integrated photonic circuits. One of the major drawbacks in the realization of photonic circuits is the damage of optical materials by intense laser pulses. Here, we report on the preparation of a series of organic–inorganic hybrid photoresists that exhibit enhanced laser-induced damage threshold. These photoresists showed to be candidates for the fabrication of micro-optical elements (MOEs) using three-dimensional multiphoton lithography. Moreover, they demonstrate pattern ability by nanoimprint lithography, making them suitable for future mass production of MOEs.

Numerical investigations of three-dimensional flows around a cylinder attaching with symmetric strips

2021 ◽  
Vol 33 (7) ◽  
pp. 075101
Author(s):  
Chunhui Ma ◽  
Weiwen Zhao ◽  
Decheng Wan
Keyword(s):  
Three Dimensional ◽  
Numerical Investigations

Three-Dimensional Compatible Sacrificial Nanoimprint Lithography for Tuning the Wettability of Thermoplastic Materials

2018 ◽  
Vol 6 (4) ◽  
Author(s):  
Molla Hasan ◽  
Imrhankhan Shajahan ◽  
Manesh Gopinadhan ◽  
Jittisa Ketkaew ◽  
Aaron Anesgart ◽  
...  
Keyword(s):  
Nanoimprint Lithography ◽  
Characteristic Length ◽  
Three Dimensional ◽  
Thermoplastic Elastomer ◽  
Growth Conditions ◽  
Surface Wetting ◽  
Chemical Surface ◽  
Patterned Surface ◽  
Elastomeric Material ◽  
Hydrophilicity And Hydrophobicity

We report the tuning of surface wetting through sacrificial nanoimprint lithography (SNIL). In this process, grown ZnO nanomaterials are transferred by imprint into a metallic glass (MG) and an elastomeric material, and then etched to impart controlled surface roughness. This process increases the hydrophilicity and hydrophobicity of both surfaces, the Pt57.5Cu14.7Ni5.3P22.5 MG and thermoplastic elastomer (TPE), respectively. The growth conditions of the ZnO change the characteristic length scale of the roughness, which in turn alters the properties of the patterned surface. The novelty of this approach includes reusability of templates and that it is able to create superhydrophilic and superhydrophobic surfaces in a manner compatible with the fabrication of macroscopic three-dimensional (3D) parts. Because the wettability is achieved by only modifying topography, without using any chemical surface modifiers, the prepared surfaces are relatively more durable.

Experimental and Numerical Study of Mixing in a Hot-Water Storage Tank

2009 ◽  
Vol 131 (1) ◽  
Author(s):  
A. Aviv ◽  
Y. Blyakhman ◽  
O. Beeri ◽  
G. Ziskind ◽  
R. Letan
Keyword(s):  
Numerical Model ◽  
Storage Tank ◽  
Numerical Study ◽  
Tap Water ◽  
Three Dimensional ◽  
Hot Water ◽  
Software Validation ◽  
Water Storage Tank ◽  
Thermal Mixing ◽  
Numerical Investigations

Thermal mixing and stratification are explored numerically and experimentally in a cylindrical tank, which simulates a storage of water heated by a solar collector. The tank is 70cm in height and 24cm in diameter. The inlet and outlet are vertical and located off the centerline of the tank. The study is conducted in a transient mode, namely, the tank is filled with hot water, and as the hot water is being withdrawn, the tap water replaces it in a stratified way or by mixing. The flowrates of 2l∕min, 3l∕min, 5l∕min and 7l∕min, which correspond to superficial velocities of 4.35cm∕min, 6.52cm∕min, 10.87cm∕min, and 15.2cm∕min, are explored. Temperature of hot water ranges within 40–50°C, while the tap water is about 25–27°C. Installation of one and two horizontal baffles above the inlet is examined. Simultaneous experimental and numerical investigations are performed. In the experiment, both flow visualization and temperature measurements are used. Three-dimensional transient numerical simulations are done using the FLUENT 6 software. Validation of the numerical model is achieved by comparison with the experimental results. Then, the numerical model is applied to a study of various possible changes in the system. The results show that at low flowrates, up to a superficial velocity of about 11cm∕min through the tank, the baffles have no effect on tap water mixing with the stored hot water. At higher flowrates, a single horizontal baffle prevents the mixing and preserves the desired stratified temperature distribution in the storage tank.

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