Multiple input multiple output controller design to match chamber performance in plasma etching for semiconductor manufacturing

2013 ◽  
Vol 31 (6) ◽  
pp. 062201 ◽  
Author(s):  
Kye Hyun Baek ◽  
Kyounghoon P. Han ◽  
Gilheyun Choi ◽  
Ho-Kyu Kang ◽  
Eun Seung Jung ◽  
...  
Keyword(s):  
Plasma Etching ◽  
Semiconductor Manufacturing ◽  
Controller Design ◽  
Multiple Input Multiple Output ◽  
Output Controller ◽  
Multiple Input ◽  
Input Multiple Output

AN ANALYSIS AND MIMO EXTENSION OF A DOUBLE EWMA RUN-TO-RUN CONTROLLER FOR NON-SQUARED SYSTEMS

2003 ◽  
Vol 10 (04) ◽  
pp. 417-428 ◽  
Author(s):  
RAMKUMAR RAJAGOPAL ◽  
ENRIQUE DEL CASTILLO
Keyword(s):  
Semiconductor Manufacturing ◽  
Control Method ◽  
Moving Average ◽  
Multiple Input Multiple Output ◽  
Processing Step ◽  
Multiple Input ◽  
Input Multiple Output ◽  
Average Control ◽  
Controllable Factor ◽  
Weighted Moving Average

The double EWMA (exponentially weighted moving average) control method is a popular algorithm for adjusting a process from run to run in semiconductor manufacturing. Until recently, the dEWMA controller had been applied only for the single controllable factor (or input), single quality charcteristic (or output) case. Recently, Del Castillo and Rajagopal4 propose a multivariate double EWMA controller for squared multiple-input, multiple-output (MIMO) processes, where there is an equal number of inputs and outputs. This paper extends the MIMO dEWMA controller for non-squared systems. Two different MIMO dEWMA controllers are presented and their performance studied with application to a Chemical-Mechanical Polishing (CMP) process, a critical semiconductor manufacture processing step that exhibits non-linear dynamics.

Nondiagonal MIMO QFT Controller Design for Darwin-Type Spacecraft With Large Flimsy Appendages

2007 ◽  
Vol 130 (1) ◽  
Author(s):  
Mario Garcia-Sanz ◽  
Irene Eguinoa ◽  
Marta Barreras ◽  
Samir Bennani
Keyword(s):  
Disturbance Rejection ◽  
Controller Design ◽  
Control Strategies ◽  
Multiple Input Multiple Output ◽  
H Infinity ◽  
Multiple Input ◽  
Input Multiple Output ◽  
Low Stiffness ◽  
Multiple Spacecraft ◽  
Mimo Model

This paper deals with the design of robust control strategies to govern the position and attitude of a Darwin-type spacecraft with large flexible appendages. The satellite is one of the flyers of a multiple spacecraft constellation for a future ESA mission. It presents a 6×6 high order multiple-input–multiple-output (MIMO) model with large uncertainty and loop interactions introduced by the flexible modes of the low-stiffness appendages. The scientific objectives of the satellite require very demanding control specifications for position and attitude accuracy, high disturbance rejection, loop-coupling attenuation, and low controller order. The paper demonstrates the feasibility of a sequential nondiagonal MIMO quantitative feedback theory (QFT) strategy controlling the Darwin spacecraft and compares the results with H-infinity and sequential diagonal MIMO QFT designs.

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