Characterization of thin film adhesion by MEMS shaft-loading blister testing
2013 ◽
Vol 31
(3)
◽
pp. 031102
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2012 ◽
Vol 211
◽
pp. 138-142
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Keyword(s):
Keyword(s):
1970 ◽
Vol 3
(6)
◽
pp. 877-883
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Keyword(s):