Investigation of resist filling behavior in microimprint lithography by computational fluid dynamics simulation and defocusing digital particle image velocimetry
2013 ◽
Vol 31
(2)
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pp. 021601
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2005 ◽
Vol 112
(1-3)
◽
pp. 197-210
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2018 ◽
Vol 140
(5)
◽
2006 ◽
Vol 30
(5)
◽
pp. 384-391
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2021 ◽