Image quality and pattern transfer in directed self assembly with block-selective atomic layer deposition

2012 ◽  
Vol 30 (6) ◽  
pp. 06F202 ◽  
Author(s):  
Ricardo Ruiz ◽  
Lei Wan ◽  
Jeffrey Lille ◽  
Kanaiyalal C. Patel ◽  
Elizabeth Dobisz ◽  
...  
Keyword(s):  
Image Quality ◽  
Atomic Layer Deposition ◽  
Self Assembly ◽  
Atomic Layer ◽  
Pattern Transfer ◽  
Layer Deposition

Self-Assembly Based Plasmonic Arrays Tuned by Atomic Layer Deposition for Extreme Visible Light Absorption

Nano Letters ◽  
2013 ◽  
Vol 13 (7) ◽  
pp. 3352-3357 ◽  
Author(s):  
Carl Hägglund ◽  
Gabriel Zeltzer ◽  
Ricardo Ruiz ◽  
Isabell Thomann ◽  
Han-Bo-Ram Lee ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Visible Light ◽  
Light Absorption ◽  
Self Assembly ◽  
Atomic Layer ◽  
Visible Light Absorption ◽  
Layer Deposition

Wafer-scale colloidal lithography based on self-assembly of polystyrene nanospheres and atomic layer deposition

2010 ◽  
Vol 20 (24) ◽  
pp. 5025 ◽  
Author(s):  
Jeong Rok Oh ◽  
Jung Ho Moon ◽  
Hoo Keun Park ◽  
Jae Hyoung Park ◽  
Haegeun Chung ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Self Assembly ◽  
Atomic Layer ◽  
Colloidal Lithography ◽  
Wafer Scale ◽  
Layer Deposition ◽  
Polystyrene Nanospheres

Formation of Titania/Silica Hybrid Nanowires Containing Linear Mesocage Arrays by Evaporation-Induced Block-Copolymer Self-Assembly and Atomic Layer Deposition

2007 ◽  
Vol 119 (36) ◽  
pp. 6953-6956 ◽  
Author(s):  
Xin Chen ◽  
Mato Knez ◽  
Andreas Berger ◽  
Kornelius Nielsch ◽  
Ulrich Gösele ◽  
...  
Keyword(s):  
Block Copolymer ◽  
Atomic Layer Deposition ◽  
Self Assembly ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Silica Hybrid

Metastable Atomic Layer Deposition: 3D Self-Assembly toward Ultradark Materials

ACS Nano ◽  
2020 ◽  
Vol 14 (11) ◽  
pp. 15023-15031
Author(s):  
Mario Ziegler ◽  
André Dathe ◽  
Kilian Pollok ◽  
Falko Langenhorst ◽  
Uwe Hübner ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Self Assembly ◽  
Atomic Layer ◽  
Layer Deposition

scholarly journals Improvement of light extraction of LYSO scintillator by using a combination of self-assembly of nanospheres and atomic layer deposition

2015 ◽  
Vol 23 (6) ◽  
pp. 7085 ◽  
Author(s):  
Zhichao Zhu ◽  
Bo Liu ◽  
Haifeng Zhang ◽  
Weina Ren ◽  
Chuanwei Cheng ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Self Assembly ◽  
Atomic Layer ◽  
Light Extraction ◽  
Layer Deposition

Controlled dielectrophoretic nanowire self-assembly using atomic layer deposition and suspended microfabricated electrodes

2012 ◽  
Vol 23 (24) ◽  
pp. 245301 ◽  
Author(s):  
Alicia I Baca ◽  
Joseph J Brown ◽  
Kris A Bertness ◽  
Victor M Bright
Keyword(s):  
Atomic Layer Deposition ◽  
Self Assembly ◽  
Atomic Layer ◽  
Layer Deposition

scholarly journals Synthesis of Double-Shelled Hollow Inorganic Nanospheres through Block Copolymer-Metal Coordination and Atomic Layer Deposition

Polymers ◽  
2019 ◽  
Vol 11 (7) ◽  
pp. 1208 ◽  
Author(s):  
Nina Yan ◽  
Qingbao Guan ◽  
Zhiming Yang ◽  
Min Feng ◽  
Xizhi Jiang ◽  
...  
Keyword(s):  
Block Copolymer ◽  
Block Copolymers ◽  
Atomic Layer Deposition ◽  
Self Assembly ◽  
Lithium Ion ◽  
Polymeric Composite ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Ligand Coordination ◽  
Metal Ligand

Double-shelled hollow (DSH) structures with varied inorganic compositions are confirmed to have improved performances in diverse applications, especially in lithium ion battery. However, it is still of great challenge to obtain these complex nanostructures with traditional hard templates and solution-based route. Here we report an innovative pathway for the preparation of the DSH nanospheres based on block copolymer self-assembly, metal–ligand coordination and atomic layer deposition. Polymeric composite micelles derived from amphiphilic block copolymers and ferric ions were prepared with heating-enabled micellization and metal–ligand coordination. The DSH nanospheres with Fe2O3 stands inner and TiO2 outer the structures can be obtained with atomic layer deposition of a thin layer of TiO2 followed with calcination in air. The coordination was carried out at room temperature and the deposition was performed at the low temperature of 80 °C, thus providing a feasible fabrication strategy for DSH structures without destruction of the templates. The cavity and the outer layer of the structures can also be simply tuned with the utilized block copolymers and the deposition cycles. These DSH inorganic nanospheres are expected to find vital applications in battery, catalysis, sensing and drug delivery, etc.

Atomic layer deposition assisted pattern transfer technology for ultra-thin block copolymer films

2016 ◽  
Vol 613 ◽  
pp. 32-37 ◽  
Author(s):  
Wenhui Chen ◽  
Jun Luo ◽  
Lingkuan Meng ◽  
Junjie Li ◽  
Jinjuan Xiang ◽  
...  
Keyword(s):  
Block Copolymer ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Pattern Transfer ◽  
Copolymer Films ◽  
Layer Deposition
Sign in / Sign up

Export Citation Format

Share Document